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Title: EUV and soft X-ray transition radiation from MIRRORCLE-type tabletop synchrotrons

Abstract

MIRRORCLE-20SX tabletop synchrotron is under development for EUV lithography. We measured the soft X ray power from the existing synchrotron MIRRORCLE-6X (6MeV machine). Transition radiation power from one thin foil target was detected by a plastic scintillator, which is calibrated by using conventional synchrotron radiation source at AIST. The output EUV power was 2.6 mW. From the experimental result of MIRRORCLE-6X we can extrapolate the EUV power for the 20MeV machine as large as one watt per foil. We expect 100 watt EUV by 100 of foils.

Authors:
 [1]; ;  [2]
  1. Photon Production Laboratory Ltd. (Japan)
  2. Synchrotron Light Life Science Center (Japan)
Publication Date:
OSTI Identifier:
21056940
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 902; Journal Issue: 1; Conference: 2. international symposium on portable synchrotron light sources and advanced applications, Shiga (Japan), 15-17 Jan 2007; Other Information: DOI: 10.1063/1.2723639; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; FOILS; LIGHT SOURCES; MASKING; PLASTIC SCINTILLATORS; PORTABLE SOURCES; SOFT X RADIATION; SYNCHROTRON RADIATION; SYNCHROTRON RADIATION SOURCES; SYNCHROTRONS; TRANSITION RADIATION

Citation Formats

Toyosugi, Norio, Minkov, Dorian, and Yamada, Hironari. EUV and soft X-ray transition radiation from MIRRORCLE-type tabletop synchrotrons. United States: N. p., 2007. Web. doi:10.1063/1.2723639.
Toyosugi, Norio, Minkov, Dorian, & Yamada, Hironari. EUV and soft X-ray transition radiation from MIRRORCLE-type tabletop synchrotrons. United States. doi:10.1063/1.2723639.
Toyosugi, Norio, Minkov, Dorian, and Yamada, Hironari. Fri . "EUV and soft X-ray transition radiation from MIRRORCLE-type tabletop synchrotrons". United States. doi:10.1063/1.2723639.
@article{osti_21056940,
title = {EUV and soft X-ray transition radiation from MIRRORCLE-type tabletop synchrotrons},
author = {Toyosugi, Norio and Minkov, Dorian and Yamada, Hironari},
abstractNote = {MIRRORCLE-20SX tabletop synchrotron is under development for EUV lithography. We measured the soft X ray power from the existing synchrotron MIRRORCLE-6X (6MeV machine). Transition radiation power from one thin foil target was detected by a plastic scintillator, which is calibrated by using conventional synchrotron radiation source at AIST. The output EUV power was 2.6 mW. From the experimental result of MIRRORCLE-6X we can extrapolate the EUV power for the 20MeV machine as large as one watt per foil. We expect 100 watt EUV by 100 of foils.},
doi = {10.1063/1.2723639},
journal = {AIP Conference Proceedings},
number = 1,
volume = 902,
place = {United States},
year = {Fri Mar 30 00:00:00 EDT 2007},
month = {Fri Mar 30 00:00:00 EDT 2007}
}