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Title: Progress In Design And Preparation Of Targets For Lithography Sources Based on MIRRORCLE-20SX

Abstract

The power of transition radiation (TR), emitted from our storage ring synchrotron (SRS) MIRRORCLE-20SX, for performing X-ray lithography (XRL), and EUV lithography (EUVL) is calculated. Results are presented for a variety of elemental one-foil TR emitting targets, as well as for multi-foil non-coherent TR targets, and multi-foil coherent TR targets. One foil targets with optimum thickness for XRL were prepared by Al, collodion, and C foils.

Authors:
 [1];  [2]; ;  [3]; ; ;  [4]
  1. 21st Century COE SLLS, Ritsumeikan University, Kusatsu 525-8577 (Japan)
  2. 21st Century COE SLLS, Ritsumeikan University, Kusatsu 525-8577, Photon Production Laboratory Ltd, 4-2-1(808) Takagai-cho Minami, Ohmihachiman 523-0898, Ritsumeikan University, Kusatsu (Japan)
  3. Photon Production Laboratory Ltd, 4-2-1(808) Takagai-cho Minami, Ohmihachiman 523-0898 (Japan)
  4. Ritsumeikan University, Kusatsu (Japan)
Publication Date:
OSTI Identifier:
21056936
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 902; Journal Issue: 1; Conference: 2. international symposium on portable synchrotron light sources and advanced applications, Shiga (Japan), 15-17 Jan 2007; Other Information: DOI: 10.1063/1.2723636; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; DESIGN; FOILS; MANUFACTURING; MASKING; NITROCELLULOSE; PHOTON EMISSION; STORAGE RINGS; SYNCHROTRON RADIATION; SYNCHROTRONS; TARGETS; TRANSITION RADIATION; ULTRAVIOLET RADIATION; X RADIATION

Citation Formats

Minkov, D., Yamada, H., Toyosugi, N., Morita, M., Okoye, E. K., Nihira, H., and Hara, M. Progress In Design And Preparation Of Targets For Lithography Sources Based on MIRRORCLE-20SX. United States: N. p., 2007. Web. doi:10.1063/1.2723636.
Minkov, D., Yamada, H., Toyosugi, N., Morita, M., Okoye, E. K., Nihira, H., & Hara, M. Progress In Design And Preparation Of Targets For Lithography Sources Based on MIRRORCLE-20SX. United States. doi:10.1063/1.2723636.
Minkov, D., Yamada, H., Toyosugi, N., Morita, M., Okoye, E. K., Nihira, H., and Hara, M. Fri . "Progress In Design And Preparation Of Targets For Lithography Sources Based on MIRRORCLE-20SX". United States. doi:10.1063/1.2723636.
@article{osti_21056936,
title = {Progress In Design And Preparation Of Targets For Lithography Sources Based on MIRRORCLE-20SX},
author = {Minkov, D. and Yamada, H. and Toyosugi, N. and Morita, M. and Okoye, E. K. and Nihira, H. and Hara, M.},
abstractNote = {The power of transition radiation (TR), emitted from our storage ring synchrotron (SRS) MIRRORCLE-20SX, for performing X-ray lithography (XRL), and EUV lithography (EUVL) is calculated. Results are presented for a variety of elemental one-foil TR emitting targets, as well as for multi-foil non-coherent TR targets, and multi-foil coherent TR targets. One foil targets with optimum thickness for XRL were prepared by Al, collodion, and C foils.},
doi = {10.1063/1.2723636},
journal = {AIP Conference Proceedings},
number = 1,
volume = 902,
place = {United States},
year = {Fri Mar 30 00:00:00 EDT 2007},
month = {Fri Mar 30 00:00:00 EDT 2007}
}