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Title: TiN surface dynamics: role of surface and bulk mass transport processes

Abstract

Transition-metal nitrides, such as TiN, have a wide variety of applications as hard, wear-resistant coatings, as diffusion barriers, and as scratch-resistant and anti-reflective coatings in optics. Understanding the surface morphological and microstructural evolution of these materials is crucial for improving the performance of devices. Studies of surface step dynamics enable determination of the rate-limiting mechanisms, corresponding surface mass transport parameters, and step energies. However, most models describing these phenomena are limited in application to simple elemental metal and semiconductor surfaces. Here, we summarize recent progress toward elucidating the interplay of surface and bulk diffusion processes on morphological evolution of compound surfaces. Specifically, we analyze the coarsening/decay kinetics of two- and three-dimensional TiN(111) islands and the effect of surface-terminated dislocations on TiN(111) steps.

Authors:
; ; ; ;  [1];  [2];  [3];  [4]
  1. Department of Materials Science, University of Illinois, 104 South Goodwin Avenue, Urbana, IL 61801 (United States)
  2. (United States)
  3. IBM Research Division, T. J. Watson Research Center, Yorktown Heights, New York 10598 (United States)
  4. Department of Physics and Astronomy, University of Toledo, Toledo, OH 43606 (United States)
Publication Date:
OSTI Identifier:
21054785
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 885; Journal Issue: 1; Conference: EAV06: Advanced summer school in physics 2006: Frontiers in contemporary physics, Mexico City (Mexico), 10-14 Jul 2006; Other Information: DOI: 10.1063/1.2563195; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DIFFUSION; DIFFUSION BARRIERS; DISLOCATIONS; KINETICS; MASS TRANSFER; MICROSTRUCTURE; OPTICS; PERFORMANCE; REFLECTIVE COATINGS; SEMICONDUCTOR MATERIALS; SURFACES; TITANIUM NITRIDES; WEAR RESISTANCE

Citation Formats

Bareno, J., Swiech, W., Petrova, V., Petrov, I., Greene, J. E., Frederick Seitz Materials Research Laboratory, University of Illinois, 104 South Goodwin Avenue, Urbana, IL 61801, Kodambaka, S., and Khare, S. V. TiN surface dynamics: role of surface and bulk mass transport processes. United States: N. p., 2007. Web. doi:10.1063/1.2563195.
Bareno, J., Swiech, W., Petrova, V., Petrov, I., Greene, J. E., Frederick Seitz Materials Research Laboratory, University of Illinois, 104 South Goodwin Avenue, Urbana, IL 61801, Kodambaka, S., & Khare, S. V. TiN surface dynamics: role of surface and bulk mass transport processes. United States. doi:10.1063/1.2563195.
Bareno, J., Swiech, W., Petrova, V., Petrov, I., Greene, J. E., Frederick Seitz Materials Research Laboratory, University of Illinois, 104 South Goodwin Avenue, Urbana, IL 61801, Kodambaka, S., and Khare, S. V. Fri . "TiN surface dynamics: role of surface and bulk mass transport processes". United States. doi:10.1063/1.2563195.
@article{osti_21054785,
title = {TiN surface dynamics: role of surface and bulk mass transport processes},
author = {Bareno, J. and Swiech, W. and Petrova, V. and Petrov, I. and Greene, J. E. and Frederick Seitz Materials Research Laboratory, University of Illinois, 104 South Goodwin Avenue, Urbana, IL 61801 and Kodambaka, S. and Khare, S. V.},
abstractNote = {Transition-metal nitrides, such as TiN, have a wide variety of applications as hard, wear-resistant coatings, as diffusion barriers, and as scratch-resistant and anti-reflective coatings in optics. Understanding the surface morphological and microstructural evolution of these materials is crucial for improving the performance of devices. Studies of surface step dynamics enable determination of the rate-limiting mechanisms, corresponding surface mass transport parameters, and step energies. However, most models describing these phenomena are limited in application to simple elemental metal and semiconductor surfaces. Here, we summarize recent progress toward elucidating the interplay of surface and bulk diffusion processes on morphological evolution of compound surfaces. Specifically, we analyze the coarsening/decay kinetics of two- and three-dimensional TiN(111) islands and the effect of surface-terminated dislocations on TiN(111) steps.},
doi = {10.1063/1.2563195},
journal = {AIP Conference Proceedings},
number = 1,
volume = 885,
place = {United States},
year = {Fri Feb 09 00:00:00 EST 2007},
month = {Fri Feb 09 00:00:00 EST 2007}
}