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Title: Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing

Abstract

We designed, fabricated and evaluated a total-reflection mirror having a designed focal size of 28 nm at 15keV. Line-focus tests on the fabricated mirror were carried out at the 1-km-long beamline (BL29XUL) of SPring-8. Nearly diffraction-limited performance with a full width at half maximum spot size of 30 nm was realized at 15 keV. We are planning to fabricate multilayer-coated mirror for realizing sub-10-nm focusing in hard x-ray region. We suggest a novel method of at-wavelength metrology. Wave-front error on the mirror surface can be estimated by a phase retrieval method using the intensity profile around the focal point. By correcting the estimated wave-front errors, sub-10-nm focusing is potentially feasible.

Authors:
; ; ; ; ; ; ; ; ; ;  [1];  [2]; ; ;  [3]
  1. Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  2. SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
  3. SPring-8/RIKEN, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
Publication Date:
OSTI Identifier:
21052683
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 879; Journal Issue: 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436223; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; BEAM PRODUCTION; ERRORS; FABRICATION; FOCUSING; HARD X RADIATION; KEV RANGE; LAYERS; MIRRORS; PERFORMANCE; PHOTON BEAMS; REFLECTION; SPRING-8 STORAGE RING; SURFACES; SYNCHROTRON RADIATION; WAVELENGTHS; X-RAY DIFFRACTION

Citation Formats

Yumoto, Hirokatsu, Mimura, Hidekazu, Matsuyama, Satoshi, Handa, Soichiro, Shibatani, Akihiko, Katagishi, Keiko, Yamamura, Kazuya, Sano, Yasuhisa, Endo, Katsuyoshi, Mori, Yuzo, Yamauchi, Kazuto, Yabashi, Makina, Nishino, Yoshinori, Tamasaku, Kenji, and Ishikawa, Tetsuya. Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing. United States: N. p., 2007. Web. doi:10.1063/1.2436223.
Yumoto, Hirokatsu, Mimura, Hidekazu, Matsuyama, Satoshi, Handa, Soichiro, Shibatani, Akihiko, Katagishi, Keiko, Yamamura, Kazuya, Sano, Yasuhisa, Endo, Katsuyoshi, Mori, Yuzo, Yamauchi, Kazuto, Yabashi, Makina, Nishino, Yoshinori, Tamasaku, Kenji, & Ishikawa, Tetsuya. Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing. United States. doi:10.1063/1.2436223.
Yumoto, Hirokatsu, Mimura, Hidekazu, Matsuyama, Satoshi, Handa, Soichiro, Shibatani, Akihiko, Katagishi, Keiko, Yamamura, Kazuya, Sano, Yasuhisa, Endo, Katsuyoshi, Mori, Yuzo, Yamauchi, Kazuto, Yabashi, Makina, Nishino, Yoshinori, Tamasaku, Kenji, and Ishikawa, Tetsuya. Fri . "Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing". United States. doi:10.1063/1.2436223.
@article{osti_21052683,
title = {Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing},
author = {Yumoto, Hirokatsu and Mimura, Hidekazu and Matsuyama, Satoshi and Handa, Soichiro and Shibatani, Akihiko and Katagishi, Keiko and Yamamura, Kazuya and Sano, Yasuhisa and Endo, Katsuyoshi and Mori, Yuzo and Yamauchi, Kazuto and Yabashi, Makina and Nishino, Yoshinori and Tamasaku, Kenji and Ishikawa, Tetsuya},
abstractNote = {We designed, fabricated and evaluated a total-reflection mirror having a designed focal size of 28 nm at 15keV. Line-focus tests on the fabricated mirror were carried out at the 1-km-long beamline (BL29XUL) of SPring-8. Nearly diffraction-limited performance with a full width at half maximum spot size of 30 nm was realized at 15 keV. We are planning to fabricate multilayer-coated mirror for realizing sub-10-nm focusing in hard x-ray region. We suggest a novel method of at-wavelength metrology. Wave-front error on the mirror surface can be estimated by a phase retrieval method using the intensity profile around the focal point. By correcting the estimated wave-front errors, sub-10-nm focusing is potentially feasible.},
doi = {10.1063/1.2436223},
journal = {AIP Conference Proceedings},
number = 1,
volume = 879,
place = {United States},
year = {Fri Jan 19 00:00:00 EST 2007},
month = {Fri Jan 19 00:00:00 EST 2007}
}