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Title: Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing

Abstract

We designed, fabricated and evaluated a total-reflection mirror having a designed focal size of 28 nm at 15keV. Line-focus tests on the fabricated mirror were carried out at the 1-km-long beamline (BL29XUL) of SPring-8. Nearly diffraction-limited performance with a full width at half maximum spot size of 30 nm was realized at 15 keV. We are planning to fabricate multilayer-coated mirror for realizing sub-10-nm focusing in hard x-ray region. We suggest a novel method of at-wavelength metrology. Wave-front error on the mirror surface can be estimated by a phase retrieval method using the intensity profile around the focal point. By correcting the estimated wave-front errors, sub-10-nm focusing is potentially feasible.

Authors:
; ; ; ; ; ; ; ; ; ;  [1];  [2]; ; ;  [3]
  1. Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  2. SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
  3. SPring-8/RIKEN, 1-1-1, Kouto, Sayo-cho, Sayo-gun, Hyogo 679-5198 (Japan)
Publication Date:
OSTI Identifier:
21052683
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 879; Journal Issue: 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436223; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; BEAM PRODUCTION; ERRORS; FABRICATION; FOCUSING; HARD X RADIATION; KEV RANGE; LAYERS; MIRRORS; PERFORMANCE; PHOTON BEAMS; REFLECTION; SPRING-8 STORAGE RING; SURFACES; SYNCHROTRON RADIATION; WAVELENGTHS; X-RAY DIFFRACTION

Citation Formats

Yumoto, Hirokatsu, Mimura, Hidekazu, Matsuyama, Satoshi, Handa, Soichiro, Shibatani, Akihiko, Katagishi, Keiko, Yamamura, Kazuya, Sano, Yasuhisa, Endo, Katsuyoshi, Mori, Yuzo, Yamauchi, Kazuto, Yabashi, Makina, Nishino, Yoshinori, Tamasaku, Kenji, and Ishikawa, Tetsuya. Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing. United States: N. p., 2007. Web. doi:10.1063/1.2436223.
Yumoto, Hirokatsu, Mimura, Hidekazu, Matsuyama, Satoshi, Handa, Soichiro, Shibatani, Akihiko, Katagishi, Keiko, Yamamura, Kazuya, Sano, Yasuhisa, Endo, Katsuyoshi, Mori, Yuzo, Yamauchi, Kazuto, Yabashi, Makina, Nishino, Yoshinori, Tamasaku, Kenji, & Ishikawa, Tetsuya. Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing. United States. doi:10.1063/1.2436223.
Yumoto, Hirokatsu, Mimura, Hidekazu, Matsuyama, Satoshi, Handa, Soichiro, Shibatani, Akihiko, Katagishi, Keiko, Yamamura, Kazuya, Sano, Yasuhisa, Endo, Katsuyoshi, Mori, Yuzo, Yamauchi, Kazuto, Yabashi, Makina, Nishino, Yoshinori, Tamasaku, Kenji, and Ishikawa, Tetsuya. Fri . "Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing". United States. doi:10.1063/1.2436223.
@article{osti_21052683,
title = {Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing},
author = {Yumoto, Hirokatsu and Mimura, Hidekazu and Matsuyama, Satoshi and Handa, Soichiro and Shibatani, Akihiko and Katagishi, Keiko and Yamamura, Kazuya and Sano, Yasuhisa and Endo, Katsuyoshi and Mori, Yuzo and Yamauchi, Kazuto and Yabashi, Makina and Nishino, Yoshinori and Tamasaku, Kenji and Ishikawa, Tetsuya},
abstractNote = {We designed, fabricated and evaluated a total-reflection mirror having a designed focal size of 28 nm at 15keV. Line-focus tests on the fabricated mirror were carried out at the 1-km-long beamline (BL29XUL) of SPring-8. Nearly diffraction-limited performance with a full width at half maximum spot size of 30 nm was realized at 15 keV. We are planning to fabricate multilayer-coated mirror for realizing sub-10-nm focusing in hard x-ray region. We suggest a novel method of at-wavelength metrology. Wave-front error on the mirror surface can be estimated by a phase retrieval method using the intensity profile around the focal point. By correcting the estimated wave-front errors, sub-10-nm focusing is potentially feasible.},
doi = {10.1063/1.2436223},
journal = {AIP Conference Proceedings},
number = 1,
volume = 879,
place = {United States},
year = {Fri Jan 19 00:00:00 EST 2007},
month = {Fri Jan 19 00:00:00 EST 2007}
}
  • The spatial resolution of scanning x-ray microscopy depends on the beam size of focused x rays. Recently, nearly diffraction-limited line focusing has been achieved using elliptical mirror optics at the 100 nm level. To realize such focusing two-dimensionally in a Kirkpatrick-Baez system, the required accuracies of the mirror aligners in this system were estimated using optical simulators based on geometrical or wave-optical theories. A focusing unit fulfilling the required adjustment accuracies was constructed. The relationships between alignment errors and focused beam profiles were quantitatively examined at the 1 km long beamline (BL29XUL) of SPring-8 to be in good agreement withmore » the simulation results.« less
  • The first test of nanoscale-focusing Kirkpatrick-Baez (KB) mirrors in the nested (or Montel) configuration used at a hard X-ray synchrotron beamline is reported. The two mirrors are both 40 mm long and coated with Pt to produce a focal length of 60 mm at 3 mrad incident angle, and collect up to a 120 {micro}m by 120 {micro}m incident X-ray beam with maximum angular acceptance of 2 mrad and a broad bandwidth of energies up to 30 keV. In an initial test a focal spot of about 150 nm in both horizontal and vertical directions was achieved with either polychromaticmore » or monochromatic beam. The nested mirror geometry, with two mirrors mounted side-by-side and perpendicular to each other, is significantly more compact and provides higher demagnification than the traditional sequential KB mirror arrangement. Ultimately, nested mirrors can focus larger divergence to improve the diffraction limit of achromatic optics. A major challenge with the fabrication of the required mirrors is the need for near-perfect mirror surfaces near the edge of at least one of the mirrors. Special polishing procedures and surface profile coating were used to preserve the mirror surface quality at the reflecting edge. Further developments aimed at achieving diffraction-limited focusing below 50 nm are underway.« less
  • The first test of nanoscale-focusing Kirkpatrick-Baez (KB) mirrors in the nested (or Montel) configuration used at a hard X-ray synchrotron beamline is reported. The two mirrors are both 40 mm long and coated with Pt to produce a focal length of 60 mm at 3 mrad incident angle, and collect up to a 120 {micro}m by 120 {micro}m incident X-ray beam with maximum angular acceptance of 2 mrad and a broad bandwidth of energies up to 30 keV. In an initial test a focal spot of about 150 nm in both horizontal and vertical directions was achieved with either polychromaticmore » or monochromatic beam. The nested mirror geometry, with two mirrors mounted side-by-side and perpendicular to each other, is significantly more compact and provides higher demagnification than the traditional sequential KB mirror arrangement. Ultimately, nested mirrors can focus larger divergence to improve the diffraction limit of achromatic optics. A major challenge with the fabrication of the required mirrors is the need for near-perfect mirror surfaces near the edge of at least one of the mirrors. Special polishing procedures and surface profile coating were used to preserve the mirror surface quality at the reflecting edge. Further developments aimed at achieving diffraction-limited focusing below 50 nm are underway.« less
  • X-ray focusing using Kirkpatrick-Baez (KB) mirrors is promising owing to their capability of highly efficient and energy-tunable focusing. We report the development of a mirror manipulator which enables KB mirror alignment with a high degree of accuracy. Mirror alignment tolerances were estimated using two types of simulators. On the basis of the simulation results, the mirror manipulator was developed to achieve an optimum KB mirror setup. As a result of focusing tests at BL29XUL of SPring-8, the beam size of 48x36 nm{sup 2} (VxH) was achieved in the full width at half maximum at an x-ray energy of 15 keV.more » Spatial resolution tests showed that a scanning x-ray microscope equipped with the KB focusing system could resolve line-and-space patterns of 80 nm linewidth in a high visibility of 60%.« less
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