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Title: Hard X-ray Focusing less than 50nm for Nanoscopy/spectroscopy

Abstract

X-ray focusing using a Kirkpatrick-Baez (KB) setup with two total reflection mirrors is a promising method, allowing highly efficient and energy-tunable focusing. Fabricated mirrors having a figure accuracy of 1 nm peak-to-valley height gave ideal diffraction-limited focusing of hard X-rays. The focal size, defined as the full width at half maximum of the intensity profile, was 36 nm x 48 nm at an X-ray energy of 15 keV. Fluorescence X-ray microscopy with KB mirrors was also developed, targeting cell biological applications. The distribution of various elements in a single cell was successfully observed with high resolution. The developed microscopy is already used for various applications in the medical field. Our next main project is the realization of sub-10-nm-level hard X-ray focusing. At-wavelength metrology is being developed, in which a phase-retrieval simulator is coded for the determination of phase errors on mirror surfaces from only the intensity profiles of a focused beam.

Authors:
; ; ; ; ;  [1]; ; ;  [2]; ;  [3];  [4];  [3];  [5]
  1. Department of Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  2. Research Center for Ultra-Precision Science and Technology, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka 565-0871 (Japan)
  3. SPring-8/RIKEN, 1-1-1 Kouto, Mikazuki, Hyogo 679-5148 (Japan)
  4. SPring-8/Japan Synchrotron Radiation Research Institute (JASRI), 1-1-1 Kouto, Mikazuki, Hyogo 679-5148 (Japan)
  5. (JASRI), 1-1-1 Kouto, Mikazuki, Hyogo 679-5148 (Japan)
Publication Date:
OSTI Identifier:
21052634
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 879; Journal Issue: 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436178; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; BEAM OPTICS; BEAM PRODUCTION; DISTRIBUTION; ERRORS; FLUORESCENCE; FOCUSING; HARD X RADIATION; KEV RANGE; MICROSCOPY; MIRRORS; PHOTON BEAMS; REFLECTION; RESOLUTION; SYNCHROTRON RADIATION; WAVELENGTHS; X-RAY SPECTROSCOPY

Citation Formats

Yamauchi, Kazuto, Mimura, Hidekazu, Matsuyama, Satoshi, Yumoto, Hirokatsu, Handa, Soichiro, Sano, Yasuhisa, Yamamura, Kazuya, Endo, Katsuyoshi, Mori, Yuzo, Nishino, Yoshinori, Tamasaku, Kenji, Yabashi, Makina, Ishikawa, Tetsuya, and SPring-8/Japan Synchrotron Radiation Research Institute. Hard X-ray Focusing less than 50nm for Nanoscopy/spectroscopy. United States: N. p., 2007. Web. doi:10.1063/1.2436178.
Yamauchi, Kazuto, Mimura, Hidekazu, Matsuyama, Satoshi, Yumoto, Hirokatsu, Handa, Soichiro, Sano, Yasuhisa, Yamamura, Kazuya, Endo, Katsuyoshi, Mori, Yuzo, Nishino, Yoshinori, Tamasaku, Kenji, Yabashi, Makina, Ishikawa, Tetsuya, & SPring-8/Japan Synchrotron Radiation Research Institute. Hard X-ray Focusing less than 50nm for Nanoscopy/spectroscopy. United States. doi:10.1063/1.2436178.
Yamauchi, Kazuto, Mimura, Hidekazu, Matsuyama, Satoshi, Yumoto, Hirokatsu, Handa, Soichiro, Sano, Yasuhisa, Yamamura, Kazuya, Endo, Katsuyoshi, Mori, Yuzo, Nishino, Yoshinori, Tamasaku, Kenji, Yabashi, Makina, Ishikawa, Tetsuya, and SPring-8/Japan Synchrotron Radiation Research Institute. Fri . "Hard X-ray Focusing less than 50nm for Nanoscopy/spectroscopy". United States. doi:10.1063/1.2436178.
@article{osti_21052634,
title = {Hard X-ray Focusing less than 50nm for Nanoscopy/spectroscopy},
author = {Yamauchi, Kazuto and Mimura, Hidekazu and Matsuyama, Satoshi and Yumoto, Hirokatsu and Handa, Soichiro and Sano, Yasuhisa and Yamamura, Kazuya and Endo, Katsuyoshi and Mori, Yuzo and Nishino, Yoshinori and Tamasaku, Kenji and Yabashi, Makina and Ishikawa, Tetsuya and SPring-8/Japan Synchrotron Radiation Research Institute},
abstractNote = {X-ray focusing using a Kirkpatrick-Baez (KB) setup with two total reflection mirrors is a promising method, allowing highly efficient and energy-tunable focusing. Fabricated mirrors having a figure accuracy of 1 nm peak-to-valley height gave ideal diffraction-limited focusing of hard X-rays. The focal size, defined as the full width at half maximum of the intensity profile, was 36 nm x 48 nm at an X-ray energy of 15 keV. Fluorescence X-ray microscopy with KB mirrors was also developed, targeting cell biological applications. The distribution of various elements in a single cell was successfully observed with high resolution. The developed microscopy is already used for various applications in the medical field. Our next main project is the realization of sub-10-nm-level hard X-ray focusing. At-wavelength metrology is being developed, in which a phase-retrieval simulator is coded for the determination of phase errors on mirror surfaces from only the intensity profiles of a focused beam.},
doi = {10.1063/1.2436178},
journal = {AIP Conference Proceedings},
number = 1,
volume = 879,
place = {United States},
year = {Fri Jan 19 00:00:00 EST 2007},
month = {Fri Jan 19 00:00:00 EST 2007}
}