State-of-the-art Thin Film X-ray Optics for Conventional Synchrotrons and FEL Sources
- Incoatec GmbH, Max-Planck-Strasse 2, 21502 Geesthacht (Germany)
- GKSS Research Center, Max-Planck-Strasse 1, 21502 Geesthacht (Germany)
- Carl Zeiss Laser Optics GmbH, Carl-Zeiss-Strasse 22, 73447 Oberkochen (Germany)
Selected aspects of simulation, preparation and characterization of total reflection and multilayer X-ray optics will be discussed. The best multilayer is found by calculating the optical properties of the coating. Sophisticated improvements in deposition technology allow the precise realisation of the specified parameters when manufacturing the X-ray optics. The quality of the shape of the substrate for the optics is measured with the aid of profilometry. X-ray reflectometry measures both film thickness as well as their lateral gradient. Last but not least we will be showing results of the development of carbon coatings as total reflection mirrors for FEL (free electron laser) sources. Over the past years we have developed optimized optics for the XUV range up to 200 eV. First FEL irradiation tests have shown that carbon coatings offer high reflectivity >95%, high radiation stability, good uniformity in thickness and roughness. An optimized coating of two stripes for different beam energies was produced especially for a tomography beamline, where a Ru/C multilayer was chosen for energies between 10 and 22 keV and a W/Si multilayer for energies between 22 and 45 keV.
- OSTI ID:
- 21052631
- Journal Information:
- AIP Conference Proceedings, Vol. 879, Issue 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436175; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
CARBON
COMPUTERIZED SIMULATION
DEPOSITION
EXTREME ULTRAVIOLET RADIATION
FREE ELECTRON LASERS
IRRADIATION
KEV RANGE
LAYERS
MANUFACTURING
MIRRORS
OPTICS
PHOTON BEAMS
REFLECTION
REFLECTIVITY
ROUGHNESS
SUBSTRATES
SYNCHROTRON RADIATION
THIN FILMS
X RADIATION