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Title: Global High-Accuracy Intercomparison of Slope Measuring Instruments

Abstract

The upcoming generation of high accuracy synchrotron radiation (SR) optics will be characterized by a slope deviation from ideal shape in the range of some 0.05{mu}rad rms at a sampling interval of about 1mm. To certify and improve the measurement capabilities of metrology tools to inspect these stringent specifications, an essential step is a worldwide intercomparison of these measurements based on a set of transfer standards. It is the aim of these cross measurements to verify the ''absolute'' correctness and comparability of the measurement results obtained by the cooperating partners when measuring the topography of specific reference optics (ROs) using their latest metrology tools and methods. Organized by members of the SR-optics community, new national and international cross measurement comparisons of typical synchrotron radiation mirrors have been realized during the last few years: A round robin test by the European COST-program (BESSY, Elettra, ESRF, Soleil) during the years 2004-2005 and a similar cooperation realized by the APS, ESRF and Spring-8 have proceeded. The first results of both projects were presented at the ''Optics and Photonics'' conference in San Diego in August 2005. This work build upon earlier work. The participants of both groups and representatives of other SR-laboratories agreed tomore » start a global cooperation bringing together the two round-robin projects and open these activities to other partners from the SR-community, optical manufacturers and other interested parties. This initiative is intended to start an extensive comparison of various measurement principles and tools and will help to push the frontiers in metrology, and hence production, to a precision well below the current state-of-the-art limit of 0.5{mu}rad rms for slope errors.« less

Authors:
; ;  [1];  [2]; ;  [3]; ;  [4]; ; ;  [5];  [6]; ;  [7]; ;  [8];  [9];  [10];  [11]
  1. BESSY mbH, Albert-Einstein-Strasse 15, 12489 Berlin (Germany)
  2. APS, Argone National Laboratory, 9700 South Cass Avenue, Argone 60439, IL (United States)
  3. Elettra, Sinchrotrone Trieste, SS14 Km163.5 in Area Science Park, 34012 Trieste (Italy)
  4. European Synchrotron Radiation Facility, ESRF, 6 rue Jules Horowitz, BP 220. 38043 Grenoble Cedex (France)
  5. ALS, Lawrence Berkeley National Laboratory, 1 Cyclotron Road, Berkeley CA 94720-8199 (United States)
  6. SPring-8/JASRI, 1-1-1 Kouto, Mikazuki-cho, Sayo-gun, Hyogo 679-5198 (Japan)
  7. Synchrotron Soleil, BP 34 -Saint Aubin, 91192 Gif sur Yvette (France)
  8. BNL, Brookhaven National Laboratory, Upton, NY 11973 (United States)
  9. Pohang Accelerator Laboratory/POSTECH, Hyoja-Dong San 31, Namku, Pohang, 790-390, Rep. of Korea (Korea, Republic of)
  10. SLS, WSLA 119, Paul Scherrer Institut, CH-5232 Villingen (Switzerland)
  11. Departement of Precision Science and Technology, Graduated School of Engineering, Osaka University, 2-1 Yamada-oka, Suita, Osaka, 565-0871 (Japan)
Publication Date:
OSTI Identifier:
21052615
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 879; Journal Issue: 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436160; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; ACCURACY; BEAM OPTICS; BESSY STORAGE RING; COMPARATIVE EVALUATIONS; EUROPEAN SYNCHROTRON RADIATION FACILITY; INTERNATIONAL COOPERATION; MEASURING INSTRUMENTS; MIRRORS; SPECIFICATIONS; SPRING-8 STORAGE RING; SYNCHROTRON RADIATION

Citation Formats

Siewert, Frank, Lammert, Heiner, Zeschke, Thomas, Assoufid, Lahsen, Cocco, Daniele, Sostero, Giovani, Hignette, Olivier, Rommeveaux, Amparo, Irick, Steve, McKinney, Wayne, Yashchuk, Valeriy, Ohashi, Haruhiko, Polack, Francois, Thomasset, Muriel, Qian, Shinan, Takacs, Peter, Rah, Seungyu, Schoenherr, Veit, and Yamauchi, Kazuto. Global High-Accuracy Intercomparison of Slope Measuring Instruments. United States: N. p., 2007. Web. doi:10.1063/1.2436160.
Siewert, Frank, Lammert, Heiner, Zeschke, Thomas, Assoufid, Lahsen, Cocco, Daniele, Sostero, Giovani, Hignette, Olivier, Rommeveaux, Amparo, Irick, Steve, McKinney, Wayne, Yashchuk, Valeriy, Ohashi, Haruhiko, Polack, Francois, Thomasset, Muriel, Qian, Shinan, Takacs, Peter, Rah, Seungyu, Schoenherr, Veit, & Yamauchi, Kazuto. Global High-Accuracy Intercomparison of Slope Measuring Instruments. United States. doi:10.1063/1.2436160.
Siewert, Frank, Lammert, Heiner, Zeschke, Thomas, Assoufid, Lahsen, Cocco, Daniele, Sostero, Giovani, Hignette, Olivier, Rommeveaux, Amparo, Irick, Steve, McKinney, Wayne, Yashchuk, Valeriy, Ohashi, Haruhiko, Polack, Francois, Thomasset, Muriel, Qian, Shinan, Takacs, Peter, Rah, Seungyu, Schoenherr, Veit, and Yamauchi, Kazuto. Fri . "Global High-Accuracy Intercomparison of Slope Measuring Instruments". United States. doi:10.1063/1.2436160.
@article{osti_21052615,
title = {Global High-Accuracy Intercomparison of Slope Measuring Instruments},
author = {Siewert, Frank and Lammert, Heiner and Zeschke, Thomas and Assoufid, Lahsen and Cocco, Daniele and Sostero, Giovani and Hignette, Olivier and Rommeveaux, Amparo and Irick, Steve and McKinney, Wayne and Yashchuk, Valeriy and Ohashi, Haruhiko and Polack, Francois and Thomasset, Muriel and Qian, Shinan and Takacs, Peter and Rah, Seungyu and Schoenherr, Veit and Yamauchi, Kazuto},
abstractNote = {The upcoming generation of high accuracy synchrotron radiation (SR) optics will be characterized by a slope deviation from ideal shape in the range of some 0.05{mu}rad rms at a sampling interval of about 1mm. To certify and improve the measurement capabilities of metrology tools to inspect these stringent specifications, an essential step is a worldwide intercomparison of these measurements based on a set of transfer standards. It is the aim of these cross measurements to verify the ''absolute'' correctness and comparability of the measurement results obtained by the cooperating partners when measuring the topography of specific reference optics (ROs) using their latest metrology tools and methods. Organized by members of the SR-optics community, new national and international cross measurement comparisons of typical synchrotron radiation mirrors have been realized during the last few years: A round robin test by the European COST-program (BESSY, Elettra, ESRF, Soleil) during the years 2004-2005 and a similar cooperation realized by the APS, ESRF and Spring-8 have proceeded. The first results of both projects were presented at the ''Optics and Photonics'' conference in San Diego in August 2005. This work build upon earlier work. The participants of both groups and representatives of other SR-laboratories agreed to start a global cooperation bringing together the two round-robin projects and open these activities to other partners from the SR-community, optical manufacturers and other interested parties. This initiative is intended to start an extensive comparison of various measurement principles and tools and will help to push the frontiers in metrology, and hence production, to a precision well below the current state-of-the-art limit of 0.5{mu}rad rms for slope errors.},
doi = {10.1063/1.2436160},
journal = {AIP Conference Proceedings},
number = 1,
volume = 879,
place = {United States},
year = {Fri Jan 19 00:00:00 EST 2007},
month = {Fri Jan 19 00:00:00 EST 2007}
}