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Title: A Vacuum Soft X-Ray Reflectometer for the Characterization of Multilayer Mirrors by Synchrotron Radiation at DA{phi}NE

Abstract

High-reflectivity multilayers are required in many soft X-ray researches, from nowadays Synchrotron Radiation (SR) to future Free Electron Laser (FEL) optics. These synthetic reflectors are capable of working at near-normal incidence covering the lower X energy range not accessible by crystal diffraction. Recently, the deposition of such devices has progressed at INFN Legnaro Laboratories (LNL), giving robust Si/Mo mirror devices and first Ni/Ti and Ni/TiO2 multilayers. To test these new optics, at INFN Frascati Laboratories (LNF) a new vacuum compatible reflectometer has been assembled and commissioned in 2005. The final system is a {theta}-2{theta} diffractometer in vacuum environment, endowed with high angular resolution and repeatability and absolute detectors. A direct characterization of multilayer performances have been accomplished by SR from a wiggler source at DA{phi}NE. Results on characterization of the vacuum reflectometer and on the new Ni-Ti based multilayers are presented.

Authors:
; ; ; ; ; ; ; ;  [1];  [2];  [2]
  1. INFN, Laboratori Nazionali di Frascati, via E. Fermi 40, I-00044 Frascati (Italy)
  2. (Italy)
Publication Date:
OSTI Identifier:
21052582
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 879; Journal Issue: 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436126; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; CRYSTALS; FREE ELECTRON LASERS; INTERFACES; LAYERS; MIRRORS; NICKEL; PERFORMANCE; REFLECTIVITY; RESOLUTION; SILICON; SOFT X RADIATION; SYNCHROTRON RADIATION; TITANIUM; TITANIUM OXIDES; X-RAY DIFFRACTION

Citation Formats

Cinque, Gianfelice, Raco, Agostino, Frani, Antonietta, Grilli, Antonio, Marcelli, Augusto, Mattarello, Valentina, Patelli, Alessandro, Rigato, Valentino, Cibin, Giannantonio, INFN, Laboratori Nazionali di Legnaro, viale dell'Universita 2, I-35020 Legnaro, and IMONT, Piazza dei Caprettari 70, I-00186 Romw. A Vacuum Soft X-Ray Reflectometer for the Characterization of Multilayer Mirrors by Synchrotron Radiation at DA{phi}NE. United States: N. p., 2007. Web. doi:10.1063/1.2436126.
Cinque, Gianfelice, Raco, Agostino, Frani, Antonietta, Grilli, Antonio, Marcelli, Augusto, Mattarello, Valentina, Patelli, Alessandro, Rigato, Valentino, Cibin, Giannantonio, INFN, Laboratori Nazionali di Legnaro, viale dell'Universita 2, I-35020 Legnaro, & IMONT, Piazza dei Caprettari 70, I-00186 Romw. A Vacuum Soft X-Ray Reflectometer for the Characterization of Multilayer Mirrors by Synchrotron Radiation at DA{phi}NE. United States. doi:10.1063/1.2436126.
Cinque, Gianfelice, Raco, Agostino, Frani, Antonietta, Grilli, Antonio, Marcelli, Augusto, Mattarello, Valentina, Patelli, Alessandro, Rigato, Valentino, Cibin, Giannantonio, INFN, Laboratori Nazionali di Legnaro, viale dell'Universita 2, I-35020 Legnaro, and IMONT, Piazza dei Caprettari 70, I-00186 Romw. Fri . "A Vacuum Soft X-Ray Reflectometer for the Characterization of Multilayer Mirrors by Synchrotron Radiation at DA{phi}NE". United States. doi:10.1063/1.2436126.
@article{osti_21052582,
title = {A Vacuum Soft X-Ray Reflectometer for the Characterization of Multilayer Mirrors by Synchrotron Radiation at DA{phi}NE},
author = {Cinque, Gianfelice and Raco, Agostino and Frani, Antonietta and Grilli, Antonio and Marcelli, Augusto and Mattarello, Valentina and Patelli, Alessandro and Rigato, Valentino and Cibin, Giannantonio and INFN, Laboratori Nazionali di Legnaro, viale dell'Universita 2, I-35020 Legnaro and IMONT, Piazza dei Caprettari 70, I-00186 Romw},
abstractNote = {High-reflectivity multilayers are required in many soft X-ray researches, from nowadays Synchrotron Radiation (SR) to future Free Electron Laser (FEL) optics. These synthetic reflectors are capable of working at near-normal incidence covering the lower X energy range not accessible by crystal diffraction. Recently, the deposition of such devices has progressed at INFN Legnaro Laboratories (LNL), giving robust Si/Mo mirror devices and first Ni/Ti and Ni/TiO2 multilayers. To test these new optics, at INFN Frascati Laboratories (LNF) a new vacuum compatible reflectometer has been assembled and commissioned in 2005. The final system is a {theta}-2{theta} diffractometer in vacuum environment, endowed with high angular resolution and repeatability and absolute detectors. A direct characterization of multilayer performances have been accomplished by SR from a wiggler source at DA{phi}NE. Results on characterization of the vacuum reflectometer and on the new Ni-Ti based multilayers are presented.},
doi = {10.1063/1.2436126},
journal = {AIP Conference Proceedings},
number = 1,
volume = 879,
place = {United States},
year = {Fri Jan 19 00:00:00 EST 2007},
month = {Fri Jan 19 00:00:00 EST 2007}
}