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Title: Testing of Radiation Hardness in the Extreme-Ultraviolet Spectral Region

Abstract

Currently we are commissioning a second multilayer-based beamline to study the radiation hardness of multilayers under extreme-ultraviolet (EUV) irradiation in an oxidizing atmosphere. Multilayer lifetime is one of the most important issues for the commercialization of extreme-ultraviolet lithography. The beamline employs a spherical multilayer mirror and a beryllium filter. The mirror demagnifies the source and reflects 13.4 nm radiation as well as visible light. The beryllium filter suppresses the visible light reflected by the mirror and provides also a barrier between the extremely clean storage ring vacuum and the water atmosphere of the test chamber.

Authors:
; ; ; ; ;  [1];  [2]
  1. Electron and Optical Physics Division, National Institute of Standards and Technology, 100 Bureau Dr, MS 8410, Gaithersburg, MD 20899 (United States)
  2. Rutgers, The State University of New Jersey, 136 Frelinghuysen Road, Piscataway, NJ 08854 (United States)
Publication Date:
OSTI Identifier:
21052559
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 879; Journal Issue: 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436103; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
43 PARTICLE ACCELERATORS; BEAM PRODUCTION; BERYLLIUM; COMMISSIONING; EXTREME ULTRAVIOLET RADIATION; FILTERS; IRRADIATION; LAYERS; MASKING; MIRRORS; PHOTON BEAMS; PHYSICAL RADIATION EFFECTS; SPHERICAL CONFIGURATION; STORAGE RINGS; TESTING; ULTRAVIOLET SPECTRA

Citation Formats

Arp, U., Tarrio, C., Grantham, S., Hill, S., Dhez, P., Lucatorto, T. B., and Ermanoski, I. Testing of Radiation Hardness in the Extreme-Ultraviolet Spectral Region. United States: N. p., 2007. Web. doi:10.1063/1.2436103.
Arp, U., Tarrio, C., Grantham, S., Hill, S., Dhez, P., Lucatorto, T. B., & Ermanoski, I. Testing of Radiation Hardness in the Extreme-Ultraviolet Spectral Region. United States. doi:10.1063/1.2436103.
Arp, U., Tarrio, C., Grantham, S., Hill, S., Dhez, P., Lucatorto, T. B., and Ermanoski, I. Fri . "Testing of Radiation Hardness in the Extreme-Ultraviolet Spectral Region". United States. doi:10.1063/1.2436103.
@article{osti_21052559,
title = {Testing of Radiation Hardness in the Extreme-Ultraviolet Spectral Region},
author = {Arp, U. and Tarrio, C. and Grantham, S. and Hill, S. and Dhez, P. and Lucatorto, T. B. and Ermanoski, I.},
abstractNote = {Currently we are commissioning a second multilayer-based beamline to study the radiation hardness of multilayers under extreme-ultraviolet (EUV) irradiation in an oxidizing atmosphere. Multilayer lifetime is one of the most important issues for the commercialization of extreme-ultraviolet lithography. The beamline employs a spherical multilayer mirror and a beryllium filter. The mirror demagnifies the source and reflects 13.4 nm radiation as well as visible light. The beryllium filter suppresses the visible light reflected by the mirror and provides also a barrier between the extremely clean storage ring vacuum and the water atmosphere of the test chamber.},
doi = {10.1063/1.2436103},
journal = {AIP Conference Proceedings},
number = 1,
volume = 879,
place = {United States},
year = {Fri Jan 19 00:00:00 EST 2007},
month = {Fri Jan 19 00:00:00 EST 2007}
}