X-ray Energy Filter using Compound Refractive Lenses
- Pohang Accelerator Laboratory, POSTECH, San 32, Hyoja-Dong, Nam-Gu, Pohang, 790-784 (Korea, Republic of)
- Department of Mechanical Engineering, POSTECH, San 32, Hyoja-Dong, Nam-Gu, Pohang, 790-784 (Korea, Republic of)
We suggest a novel X-ray energy filter based on LIGA fabricated compound refractive lenses, and describe the results that we have been carrying out a feasibility study on our proposal. The filter consists of both of lenses array and slits, which are exactly aligned to optical axis by a lens-guide built on the same plan with slit. Its fine resist microstructure is obtained through an exposure/develops process to be characterized, optimized, and stabilized. In addition, the resist structure of slits is filled as Cu by using electroforming with accurate replication after the developing process. We describe a manufacturing process of the filter and describe some quantitative results to prove that our proposal is feasible.
- OSTI ID:
- 21049307
- Journal Information:
- AIP Conference Proceedings, Vol. 879, Issue 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436351; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
Similar Records
X-ray Lenses Fabricated by LIGA Technology
Refractive lenses fabricated by deep SR lithography and LIGA technology for X-ray energies from 1 keV to 1 MeV