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Title: Optomechanical Design of a Hard X-ray Nanoprobe Instrument with Nanometer-Scale Active Vibration Control

Abstract

We are developing a new hard x-ray nanoprobe instrument that is one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials being constructed at Argonne National Laboratory. This new probe will cover an energy range of 3-30 keV with 30-nm spacial resolution. The system is designed to accommodate x-ray optics with a resolution limit of 10 nm, therefore, it requires staging of x-ray optics and specimens with a mechanical repeatability of better than 5 nm. Fast feedback for differential vibration control between the zone-plate x-ray optics and the sample holder has been implemented in the design using a digital-signal-processor-based real-time closed-loop feedback technique. A specially designed, custom-built laser Doppler displacement meter system provides two-dimensional differential displacement measurements with subnanometer resolution between the zone-plate x-ray optics and the sample holder. The optomechanical design of the instrument positioning stage system with nanometer-scale active vibration control is presented in this paper.

Authors:
; ;  [1]; ;  [2];  [3]; ; ;  [4];  [2];  [3]
  1. APS Engineering Support Division, Argonne National Laboratory, Argonne, IL 60439 (United States)
  2. Center for Nanoscale Materials, Argonne National Laboratory, Argonne, IL 60439 (United States)
  3. (United States)
  4. X-ray Sciences Division, Argonne National Laboratory, Argonne, IL 60439 (United States)
Publication Date:
OSTI Identifier:
21049269
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 879; Journal Issue: 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436307; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ANL; BEAM OPTICS; BEAM POSITION; CONTROL; DESIGN; FEEDBACK; HARD X RADIATION; KEV RANGE; LASERS; NANOSTRUCTURES; PLATES; PROBES; RESOLUTION; SAMPLE HOLDERS

Citation Formats

Shu, D., Preissner, C., Smolyanitskiy, A., Maser, J., Winarski, R., X-ray Sciences Division, Argonne National Laboratory, Argonne, IL 60439, Holt, M., Lai, B., Vogt, S., Stephenson, G. B., and Materials Sciences Division, Argonne National Laboratory, Argonne, IL 60439. Optomechanical Design of a Hard X-ray Nanoprobe Instrument with Nanometer-Scale Active Vibration Control. United States: N. p., 2007. Web. doi:10.1063/1.2436307.
Shu, D., Preissner, C., Smolyanitskiy, A., Maser, J., Winarski, R., X-ray Sciences Division, Argonne National Laboratory, Argonne, IL 60439, Holt, M., Lai, B., Vogt, S., Stephenson, G. B., & Materials Sciences Division, Argonne National Laboratory, Argonne, IL 60439. Optomechanical Design of a Hard X-ray Nanoprobe Instrument with Nanometer-Scale Active Vibration Control. United States. doi:10.1063/1.2436307.
Shu, D., Preissner, C., Smolyanitskiy, A., Maser, J., Winarski, R., X-ray Sciences Division, Argonne National Laboratory, Argonne, IL 60439, Holt, M., Lai, B., Vogt, S., Stephenson, G. B., and Materials Sciences Division, Argonne National Laboratory, Argonne, IL 60439. Fri . "Optomechanical Design of a Hard X-ray Nanoprobe Instrument with Nanometer-Scale Active Vibration Control". United States. doi:10.1063/1.2436307.
@article{osti_21049269,
title = {Optomechanical Design of a Hard X-ray Nanoprobe Instrument with Nanometer-Scale Active Vibration Control},
author = {Shu, D. and Preissner, C. and Smolyanitskiy, A. and Maser, J. and Winarski, R. and X-ray Sciences Division, Argonne National Laboratory, Argonne, IL 60439 and Holt, M. and Lai, B. and Vogt, S. and Stephenson, G. B. and Materials Sciences Division, Argonne National Laboratory, Argonne, IL 60439},
abstractNote = {We are developing a new hard x-ray nanoprobe instrument that is one of the centerpieces of the characterization facilities of the Center for Nanoscale Materials being constructed at Argonne National Laboratory. This new probe will cover an energy range of 3-30 keV with 30-nm spacial resolution. The system is designed to accommodate x-ray optics with a resolution limit of 10 nm, therefore, it requires staging of x-ray optics and specimens with a mechanical repeatability of better than 5 nm. Fast feedback for differential vibration control between the zone-plate x-ray optics and the sample holder has been implemented in the design using a digital-signal-processor-based real-time closed-loop feedback technique. A specially designed, custom-built laser Doppler displacement meter system provides two-dimensional differential displacement measurements with subnanometer resolution between the zone-plate x-ray optics and the sample holder. The optomechanical design of the instrument positioning stage system with nanometer-scale active vibration control is presented in this paper.},
doi = {10.1063/1.2436307},
journal = {AIP Conference Proceedings},
number = 1,
volume = 879,
place = {United States},
year = {Fri Jan 19 00:00:00 EST 2007},
month = {Fri Jan 19 00:00:00 EST 2007}
}