Hard X-Ray Nanoprobe based on Refractive X-Ray Lenses
- Institute of Structural Physics, Dresden University of Technology, D-01062 Dresden (Germany)
- II. Physikalisches Institut, Aachen University, D-52056 Aachen (Germany)
- ESRF, BP 220, F-38043 Grenoble (France)
- Dept. Anal. Chem., Ghent University, Krijgslaan 281 S12, B-9000 Ghent (Belgium)
- ISG, Forschungszentrum Juelich, D-52425 Juelich (Germany)
- Fraunhofer IZM, Dept. of Multi Device Integration, Reichenhainer Str. 88, D-09126 Chemnitz (Germany)
At synchrotron radiation sources, parabolic refractive x-ray lenses allow one to built both full field and scanning microscopes in the hard x-ray range. The latter microscope can be operated in transmission, fluorescence, and diffraction mode, giving chemical, elemental, and structural contrast. For scanning microscopy, a small and intensive microbeam is required. Parabolic refractive x-ray lenses with a focal distance in the centimeter range, so-called nanofocusing lenses (NFLs), can generate hard x-ray nanobeams in the range of 100 nm and below, even at short distances, i. e., 40 to 70 m from the source. Recently, a 47 x 55 nm2 beam with 1.7 {center_dot} 108 ph/s at 21 keV (monochromatic, Si 111) was generated using silicon NFLs in crossed geometry at a distance of 47m from the undulator source at beamline ID13 of ESRF. This beam is not diffraction limited, and smaller beams may become available in the future. Lenses made of more transparent materials, such as boron or diamond, could yield an increase in flux of one order of magnitude and have a larger numerical aperture. For these NFLs, diffraction limits below 20 nm are conceivable. Using adiabatically focusing lenses, the diffraction limit can in principle be pushed below 5 nm.
- OSTI ID:
- 21049262
- Journal Information:
- AIP Conference Proceedings, Vol. 879, Issue 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436301; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
- Country of Publication:
- United States
- Language:
- English
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