skip to main content
OSTI.GOV title logo U.S. Department of Energy
Office of Scientific and Technical Information

Title: Soft X-ray Zone Plate Microscopy to 10 nm Resolution with XM-1 at the ALS

Abstract

Soft x-ray zone plate microscopy provides a unique combination of capabilities that complement those of electron and scanning probe microscopies. Tremendous efforts are taken worldwide to achieve sub-10 nm resolution, which will permit extension of x-ray microscopy to a broader range of nanosciences and nanotechnologies. In this paper, the overlay nanofabrication technique is described, which permits zone width of 15 nm and below to be fabricated. The fabrication results of 12 nm zone plates, and the stacking of identical zone patterns for higher aspect ratio, are discussed.

Authors:
;  [1]; ; ;  [2]
  1. University of California, Berkeley, California, CA 94720 (United States)
  2. Center for X-ray Optics, Lawrence Berkeley National Laboratory, Berkeley, California, CA 94720 (United States)
Publication Date:
OSTI Identifier:
21049255
Resource Type:
Journal Article
Resource Relation:
Journal Name: AIP Conference Proceedings; Journal Volume: 879; Journal Issue: 1; Conference: 9. international conference on synchrotron radiation instrumentation, Daegu (Korea, Republic of), 28 May - 2 Jun 2006; Other Information: DOI: 10.1063/1.2436295; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ADVANCED LIGHT SOURCE; ASPECT RATIO; ELECTRONS; MICROSCOPY; NANOSTRUCTURES; PLATES; RESOLUTION; SOFT X RADIATION

Citation Formats

Chao Weilun, Attwood, David T., Anderson, Erik H., Harteneck, Bruce D., and Liddle, J. Alexander. Soft X-ray Zone Plate Microscopy to 10 nm Resolution with XM-1 at the ALS. United States: N. p., 2007. Web. doi:10.1063/1.2436295.
Chao Weilun, Attwood, David T., Anderson, Erik H., Harteneck, Bruce D., & Liddle, J. Alexander. Soft X-ray Zone Plate Microscopy to 10 nm Resolution with XM-1 at the ALS. United States. doi:10.1063/1.2436295.
Chao Weilun, Attwood, David T., Anderson, Erik H., Harteneck, Bruce D., and Liddle, J. Alexander. Fri . "Soft X-ray Zone Plate Microscopy to 10 nm Resolution with XM-1 at the ALS". United States. doi:10.1063/1.2436295.
@article{osti_21049255,
title = {Soft X-ray Zone Plate Microscopy to 10 nm Resolution with XM-1 at the ALS},
author = {Chao Weilun and Attwood, David T. and Anderson, Erik H. and Harteneck, Bruce D. and Liddle, J. Alexander},
abstractNote = {Soft x-ray zone plate microscopy provides a unique combination of capabilities that complement those of electron and scanning probe microscopies. Tremendous efforts are taken worldwide to achieve sub-10 nm resolution, which will permit extension of x-ray microscopy to a broader range of nanosciences and nanotechnologies. In this paper, the overlay nanofabrication technique is described, which permits zone width of 15 nm and below to be fabricated. The fabrication results of 12 nm zone plates, and the stacking of identical zone patterns for higher aspect ratio, are discussed.},
doi = {10.1063/1.2436295},
journal = {AIP Conference Proceedings},
number = 1,
volume = 879,
place = {United States},
year = {Fri Jan 19 00:00:00 EST 2007},
month = {Fri Jan 19 00:00:00 EST 2007}
}