Nanoelectronics: Metrology and Computation

Journal Article · Wed Sep 26 00:00:00 EDT 2007 · AIP Conference Proceedings

DOI:https://doi.org/10.1063/1.2799437· OSTI ID:21032733

Lundstrom, Mark; Clark, Jason V; Klimeck, Gerhard; Raman, Arvind ^[1]

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1. Network for Computational Nanotechnology, Purdue University West Lafayette, IN 47907 (United States)

Research in nanoelectronics poses new challenges for metrology, but advances in theory, simulation and computing and networking technology provide new opportunities to couple simulation and metrology. This paper begins with a brief overview of current work in computational nanoelectronics. Three examples of how computation can assist metrology will then be discussed. The paper concludes with a discussion of how cyberinfrastructure can help connect computing and metrology using the nanoHUB (www.nanoHUB.org) as a specific example.

• OSTI ID: 21032733
• Journal Information: AIP Conference Proceedings, Vol. 931, Issue 1; Conference: 2007 international conference on frontiers of characterization and metrology, Gaithersburg, MD (United States), 27-29 Mar 2007; Other Information: DOI: 10.1063/1.2799437; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0094-243X
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ATOMIC FORCE MICROSCOPY
CALCULATION METHODS
COMPUTERIZED SIMULATION
MICROELECTRONICS
NANOSTRUCTURES