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Title: Energy-filtered Photoelectron Emission Microscopy (EF-PEEM) for imaging nanoelectronic materials

Abstract

Photoelectron-Emission Microscopy (PEEM) is the most promising approach to photoemission-based (XPS, UPS) imaging techniques with high lateral resolution, typically below 100 nm. It has now reached its maturity with a new generation of instruments with energy-filtering capabilities. Therefore UPS and XPS imaging with energy-filtered PEEM (EF-PEEM) can be applied to technologically-relevant samples. UPS images with contrast in local work function, obtained with laboratory UV sources, are obtained in ultra-high vacuum environment with lateral resolutions better than 50 nm and sensitivies of 20 meV. XPS images with elemental and bonding state contrast can show up lateral resolution better than 200 nm with synchrotron excitation. In this paper, we present the principles and capabilities of EF-PEEM and nanospectroscopy. Then, we focus on an example of application to non-destructive work-function imaging of polycrystalline copper for advanced interconnects, where it is shown that EF-PEEM is an alternative to Kelvin probes.

Authors:
;  [1]
  1. CEA LETI-MINATEC, 17, rue des Martyrs, 38054 Grenoble Cedex 09 (France)
Publication Date:
OSTI Identifier:
21032730
Resource Type:
Journal Article
Journal Name:
AIP Conference Proceedings
Additional Journal Information:
Journal Volume: 931; Journal Issue: 1; Conference: 2007 international conference on frontiers of characterization and metrology, Gaithersburg, MD (United States), 27-29 Mar 2007; Other Information: DOI: 10.1063/1.2799425; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0094-243X
Country of Publication:
United States
Language:
English
Subject:
74 ATOMIC AND MOLECULAR PHYSICS; BOUND STATE; COPPER; EMISSION SPECTROSCOPY; EXCITATION; NANOSTRUCTURES; PHOTOEMISSION; POLYCRYSTALS; RESOLUTION; ULTRAVIOLET RADIATION; WORK FUNCTIONS; X-RAY PHOTOELECTRON SPECTROSCOPY

Citation Formats

Renault, Olivier, and Chabli, Amal. Energy-filtered Photoelectron Emission Microscopy (EF-PEEM) for imaging nanoelectronic materials. United States: N. p., 2007. Web. doi:10.1063/1.2799425.
Renault, Olivier, & Chabli, Amal. Energy-filtered Photoelectron Emission Microscopy (EF-PEEM) for imaging nanoelectronic materials. United States. https://doi.org/10.1063/1.2799425
Renault, Olivier, and Chabli, Amal. 2007. "Energy-filtered Photoelectron Emission Microscopy (EF-PEEM) for imaging nanoelectronic materials". United States. https://doi.org/10.1063/1.2799425.
@article{osti_21032730,
title = {Energy-filtered Photoelectron Emission Microscopy (EF-PEEM) for imaging nanoelectronic materials},
author = {Renault, Olivier and Chabli, Amal},
abstractNote = {Photoelectron-Emission Microscopy (PEEM) is the most promising approach to photoemission-based (XPS, UPS) imaging techniques with high lateral resolution, typically below 100 nm. It has now reached its maturity with a new generation of instruments with energy-filtering capabilities. Therefore UPS and XPS imaging with energy-filtered PEEM (EF-PEEM) can be applied to technologically-relevant samples. UPS images with contrast in local work function, obtained with laboratory UV sources, are obtained in ultra-high vacuum environment with lateral resolutions better than 50 nm and sensitivies of 20 meV. XPS images with elemental and bonding state contrast can show up lateral resolution better than 200 nm with synchrotron excitation. In this paper, we present the principles and capabilities of EF-PEEM and nanospectroscopy. Then, we focus on an example of application to non-destructive work-function imaging of polycrystalline copper for advanced interconnects, where it is shown that EF-PEEM is an alternative to Kelvin probes.},
doi = {10.1063/1.2799425},
url = {https://www.osti.gov/biblio/21032730}, journal = {AIP Conference Proceedings},
issn = {0094-243X},
number = 1,
volume = 931,
place = {United States},
year = {Wed Sep 26 00:00:00 EDT 2007},
month = {Wed Sep 26 00:00:00 EDT 2007}
}