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Title: X-ray pole figure analysis on columnar-structured microcrystalline silicon: Growth-induced crystallographic axial alignment in solid phase

Abstract

Angular distributions of crystallographic axes of the microcrystalline silicon ({mu}c-Si) thin films have been investigated using the x-ray pole figure measurements with an emphasis on the growth-induced changes in the first growth regions of the {mu}c-Si films. The (220) preferentially oriented {mu}c-Si films containing columnar microstructures were prepared by plasma enhanced chemical vapor deposition with differing thicknesses. The distributions in the tilt angles of <220> axes from the substrate normal decreased with increasing the film thickness, particularly in the first 0.5 {mu}m growth regions. Meanwhile, such a change was not found in <111> axes. Moreover, the x-ray pole figure measurements were also carried out for the (111) preferentially oriented {mu}c-Si films containing granular microstructures, revealing that no pronounced change in the tilt angles of <111> axes were found during the film growth. Therefore, the axial alignment should be specific to the <220> axes in the {mu}c-Si films with the (220) preferential orientation. In conjunction with the other experimental results on the microstructures, the growth-induced structural changes in solid phase are discussed.

Authors:
; ; ; ; ; ; ;  [1];  [2]
  1. Department of Systems Innovation, Graduate School of Engineering Science, Osaka University, Toyonaka, Osaka 560-8531 (Japan)
  2. (Japan)
Publication Date:
OSTI Identifier:
20982893
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 10; Other Information: DOI: 10.1063/1.2738403; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ANGULAR DISTRIBUTION; CHEMICAL VAPOR DEPOSITION; CRYSTAL GROWTH; CRYSTAL STRUCTURE; CRYSTALLOGRAPHY; GRAIN ORIENTATION; MICROSTRUCTURE; PLASMA; SEMICONDUCTOR MATERIALS; SILICON; SUBSTRATES; TEXTURE; THICKNESS; THIN FILMS

Citation Formats

Sobajima, Yasushi, Nakano, Shinya, Toyama, Toshihiko, Okamoto, Hiroaki, Omae, Satoshi, Minemoto, Takashi, Takakura, Hideyuki, Hamakawa, Yoshihiro, and Faculty of Science and Engineering, Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu, Shiga 525-8577. X-ray pole figure analysis on columnar-structured microcrystalline silicon: Growth-induced crystallographic axial alignment in solid phase. United States: N. p., 2007. Web. doi:10.1063/1.2738403.
Sobajima, Yasushi, Nakano, Shinya, Toyama, Toshihiko, Okamoto, Hiroaki, Omae, Satoshi, Minemoto, Takashi, Takakura, Hideyuki, Hamakawa, Yoshihiro, & Faculty of Science and Engineering, Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu, Shiga 525-8577. X-ray pole figure analysis on columnar-structured microcrystalline silicon: Growth-induced crystallographic axial alignment in solid phase. United States. doi:10.1063/1.2738403.
Sobajima, Yasushi, Nakano, Shinya, Toyama, Toshihiko, Okamoto, Hiroaki, Omae, Satoshi, Minemoto, Takashi, Takakura, Hideyuki, Hamakawa, Yoshihiro, and Faculty of Science and Engineering, Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu, Shiga 525-8577. Tue . "X-ray pole figure analysis on columnar-structured microcrystalline silicon: Growth-induced crystallographic axial alignment in solid phase". United States. doi:10.1063/1.2738403.
@article{osti_20982893,
title = {X-ray pole figure analysis on columnar-structured microcrystalline silicon: Growth-induced crystallographic axial alignment in solid phase},
author = {Sobajima, Yasushi and Nakano, Shinya and Toyama, Toshihiko and Okamoto, Hiroaki and Omae, Satoshi and Minemoto, Takashi and Takakura, Hideyuki and Hamakawa, Yoshihiro and Faculty of Science and Engineering, Ritsumeikan University, 1-1-1 Nojihigashi, Kusatsu, Shiga 525-8577},
abstractNote = {Angular distributions of crystallographic axes of the microcrystalline silicon ({mu}c-Si) thin films have been investigated using the x-ray pole figure measurements with an emphasis on the growth-induced changes in the first growth regions of the {mu}c-Si films. The (220) preferentially oriented {mu}c-Si films containing columnar microstructures were prepared by plasma enhanced chemical vapor deposition with differing thicknesses. The distributions in the tilt angles of <220> axes from the substrate normal decreased with increasing the film thickness, particularly in the first 0.5 {mu}m growth regions. Meanwhile, such a change was not found in <111> axes. Moreover, the x-ray pole figure measurements were also carried out for the (111) preferentially oriented {mu}c-Si films containing granular microstructures, revealing that no pronounced change in the tilt angles of <111> axes were found during the film growth. Therefore, the axial alignment should be specific to the <220> axes in the {mu}c-Si films with the (220) preferential orientation. In conjunction with the other experimental results on the microstructures, the growth-induced structural changes in solid phase are discussed.},
doi = {10.1063/1.2738403},
journal = {Journal of Applied Physics},
number = 10,
volume = 101,
place = {United States},
year = {Tue May 15 00:00:00 EDT 2007},
month = {Tue May 15 00:00:00 EDT 2007}
}
  • In investigations of possible fuel elements for Japan Research Reactor- 3, the properties of 10 mm uranium rod were studied. The effect of beta - treatment on uranium rod was studied from the points of thermal cycling growth coefficient, thermal expansion coefficient, hardness, and microstructure. As the preparation of the pole figure of a uranium fuel rod was very troublesome, the inverse pole figure method was used to describe the texture of the specimen. The (001) projection of alpha uranium is used in this inverse pole figure. Intensities of the diffractions from 22 planes of a specimen were measured andmore » used for calculations. Inverse pole figures of beta -treated uranium rods rolled at 300 and 600 deg C respectively were also made. From the results, beta -treatment at 720 deg C was found to have a better effect on the texture of uranium rod than that at 680 deg C; more homogenous distribution of crystallographic planes could be obtained, which is, therefore, the reason beta - treatment at 720 deg C gives a smaller thermal cycling coefficient. The more homogenous the distribution of the planes in the beta -treated specimen, the smaller the thermal cycling coefficient. (auth)« less
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  • BS>For the purpose of developing the fuel elements used in JRR-3, the properties of uranium rods fabricated to 10 mm in diameter are studied. The effects of beta -treatment on uranium fuel rods were studied from the point of inverse pole figures method. The effect of thermal cycling on the 300 deg C rolled uranium rods textures is compared with the effects of recrystallization. Specimens were thermally cycled up to 1,000 times and the changes of the inverse pole figures were carefully examined. Remarkable changes occurred in the inverse pole figures of 300 deg C rolled uranium specimens completely beforemore » 300 cycles, and little change was observed from 300 to 1,000 cycles. It becomes clear from these data that the pole figures of the specimens which were thermally cycled are very similar to that of the partially recrystallized ones.« less