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Title: He{sup +} ion irradiation study of continuous and patterned Co/Pd multilayers

Abstract

Ion irradiation of continuous and patterned (Co/Pd){sub n} magnetic multilayer films has been studied as a mean to control magnetic anisotropy as well as to evaluate possible ion irradiation damage involved in ion-beam proximity lithography patterning. The coercivity of patterned medium was found to decrease from 11 kOe for as patterned samples to 0.3 kOe for samples with 800 {mu}C/cm{sup 2} ion irradiation. Remnant squareness of the patterned samples remained essentially unchanged. As the number of bilayers increases in the sample, the effects vary, suggesting that several mechanisms of damage occur. Significantly, for typical irradiation doses used in ion-beam proximity lithography, no measurable alteration of magnetic properties was observed.

Authors:
; ; ; ; ;  [1];  [2];  [2];  [2]
  1. Center for Nanomagnetic Systems, University of Houston, Houston, Texas 77204 (United States)
  2. (United States)
Publication Date:
OSTI Identifier:
20982826
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 8; Other Information: DOI: 10.1063/1.2719018; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ANISOTROPY; COBALT; COERCIVE FORCE; FERROMAGNETIC MATERIALS; HELIUM IONS; HYSTERESIS; ION BEAMS; IRRADIATION; LAYERS; MAGNETIC PROPERTIES; PALLADIUM; RADIATION DOSES; THIN FILMS

Citation Formats

Parekh, Vishal, Smith, Darren, E, Chunsheng, Rantschler, James, Khizroev, Sakhrat, Litvinov, Dmitri, Electrical Engineering, University of California--Riverside, Riverside, California 92521, Center for Nanomagnetic Systems, University of Houston, Houston, Texas 77204, and Sentorix, Inc., Pearland, TX 77584. He{sup +} ion irradiation study of continuous and patterned Co/Pd multilayers. United States: N. p., 2007. Web. doi:10.1063/1.2719018.
Parekh, Vishal, Smith, Darren, E, Chunsheng, Rantschler, James, Khizroev, Sakhrat, Litvinov, Dmitri, Electrical Engineering, University of California--Riverside, Riverside, California 92521, Center for Nanomagnetic Systems, University of Houston, Houston, Texas 77204, & Sentorix, Inc., Pearland, TX 77584. He{sup +} ion irradiation study of continuous and patterned Co/Pd multilayers. United States. doi:10.1063/1.2719018.
Parekh, Vishal, Smith, Darren, E, Chunsheng, Rantschler, James, Khizroev, Sakhrat, Litvinov, Dmitri, Electrical Engineering, University of California--Riverside, Riverside, California 92521, Center for Nanomagnetic Systems, University of Houston, Houston, Texas 77204, and Sentorix, Inc., Pearland, TX 77584. Sun . "He{sup +} ion irradiation study of continuous and patterned Co/Pd multilayers". United States. doi:10.1063/1.2719018.
@article{osti_20982826,
title = {He{sup +} ion irradiation study of continuous and patterned Co/Pd multilayers},
author = {Parekh, Vishal and Smith, Darren and E, Chunsheng and Rantschler, James and Khizroev, Sakhrat and Litvinov, Dmitri and Electrical Engineering, University of California--Riverside, Riverside, California 92521 and Center for Nanomagnetic Systems, University of Houston, Houston, Texas 77204 and Sentorix, Inc., Pearland, TX 77584},
abstractNote = {Ion irradiation of continuous and patterned (Co/Pd){sub n} magnetic multilayer films has been studied as a mean to control magnetic anisotropy as well as to evaluate possible ion irradiation damage involved in ion-beam proximity lithography patterning. The coercivity of patterned medium was found to decrease from 11 kOe for as patterned samples to 0.3 kOe for samples with 800 {mu}C/cm{sup 2} ion irradiation. Remnant squareness of the patterned samples remained essentially unchanged. As the number of bilayers increases in the sample, the effects vary, suggesting that several mechanisms of damage occur. Significantly, for typical irradiation doses used in ion-beam proximity lithography, no measurable alteration of magnetic properties was observed.},
doi = {10.1063/1.2719018},
journal = {Journal of Applied Physics},
number = 8,
volume = 101,
place = {United States},
year = {Sun Apr 15 00:00:00 EDT 2007},
month = {Sun Apr 15 00:00:00 EDT 2007}
}