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Title: Mode transitions and hysteresis in inductively coupled plasmas

Abstract

Optical emission spectroscopy as a noninvasive plasma diagnostic was employed to study mode transitions and hysteresis in an inductively coupled plasma in Ar and Ar/N{sub 2} mixtures. Using selected Ar lines, basic plasma parameters, relevant to the analysis of the mode transitions, were evaluated. Small changes of the electron energy distribution function in the vicinity of the mode transition were detected. The role of metastable Ar atoms in mode transitions and in a hysteresis was clarified. Enhanced production of metastables in the hysteresis region as well as faster transitions in plasmas with higher influence of metastables were observed.

Authors:
; ; ; ; ;  [1];  [2];  [3]
  1. Center for Semiconductor Components, Universidade Estadual de Campinas--UNICAMP, P.O. Box 6061, Campinas SP 13083-870 (Brazil)
  2. (Russian Federation)
  3. (Brazil)
Publication Date:
OSTI Identifier:
20982792
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 7; Other Information: DOI: 10.1063/1.2715845; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ARGON; ELECTRONS; EMISSION SPECTROSCOPY; ENERGY SPECTRA; HYSTERESIS; MIXTURES; NITROGEN; PLASMA; PLASMA DIAGNOSTICS; PLASMA INSTABILITY

Citation Formats

Daltrini, A. M., Moshkalev, S. A., Monteiro, M. J. R., Besseler, E., Kostryukov, A., Machida, M., Plasma Physics Department, St. Petersburg Polytechnical University, St. Petersburg 194021, and Institute of Physics 'Gleb Wataghin', Universidade Estadual de Campinas--UNICAMP, P.O. Box 6101, Campinas SP 13083-970. Mode transitions and hysteresis in inductively coupled plasmas. United States: N. p., 2007. Web. doi:10.1063/1.2715845.
Daltrini, A. M., Moshkalev, S. A., Monteiro, M. J. R., Besseler, E., Kostryukov, A., Machida, M., Plasma Physics Department, St. Petersburg Polytechnical University, St. Petersburg 194021, & Institute of Physics 'Gleb Wataghin', Universidade Estadual de Campinas--UNICAMP, P.O. Box 6101, Campinas SP 13083-970. Mode transitions and hysteresis in inductively coupled plasmas. United States. doi:10.1063/1.2715845.
Daltrini, A. M., Moshkalev, S. A., Monteiro, M. J. R., Besseler, E., Kostryukov, A., Machida, M., Plasma Physics Department, St. Petersburg Polytechnical University, St. Petersburg 194021, and Institute of Physics 'Gleb Wataghin', Universidade Estadual de Campinas--UNICAMP, P.O. Box 6101, Campinas SP 13083-970. Sun . "Mode transitions and hysteresis in inductively coupled plasmas". United States. doi:10.1063/1.2715845.
@article{osti_20982792,
title = {Mode transitions and hysteresis in inductively coupled plasmas},
author = {Daltrini, A. M. and Moshkalev, S. A. and Monteiro, M. J. R. and Besseler, E. and Kostryukov, A. and Machida, M. and Plasma Physics Department, St. Petersburg Polytechnical University, St. Petersburg 194021 and Institute of Physics 'Gleb Wataghin', Universidade Estadual de Campinas--UNICAMP, P.O. Box 6101, Campinas SP 13083-970},
abstractNote = {Optical emission spectroscopy as a noninvasive plasma diagnostic was employed to study mode transitions and hysteresis in an inductively coupled plasma in Ar and Ar/N{sub 2} mixtures. Using selected Ar lines, basic plasma parameters, relevant to the analysis of the mode transitions, were evaluated. Small changes of the electron energy distribution function in the vicinity of the mode transition were detected. The role of metastable Ar atoms in mode transitions and in a hysteresis was clarified. Enhanced production of metastables in the hysteresis region as well as faster transitions in plasmas with higher influence of metastables were observed.},
doi = {10.1063/1.2715845},
journal = {Journal of Applied Physics},
number = 7,
volume = 101,
place = {United States},
year = {Sun Apr 01 00:00:00 EDT 2007},
month = {Sun Apr 01 00:00:00 EDT 2007}
}