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Title: The effect of nitrogen incorporation on the bonding structure of hydrogenated carbon nitride films

Abstract

This work describes the composition and bonding structure of hydrogenated carbon nitride (a-CN{sub x}:H) films synthesized by electron cyclotron resonance chemical vapor deposition using as precursor gases argon, methane, and nitrogen. The composition of the films was derived from Rutherford backscattering and elastic recoil detection analysis and the bonding structure was examined by infrared (IR) spectroscopy and x-ray absorption near edge spectroscopy (XANES). By varying the nitrogen to methane ratio in the applied gas mixture, polymeric a-CN{sub x}:H films with N/C contents varying from 0.06 to 0.49 were obtained. Remarkably, the H content of the films ({approx}40 at. %) was rather unaffected by the nitrogenation process. The different bonding states as detected in the measured XANES C(1s) and N(1s) spectra have been correlated with those of a large number of reference samples. The XANES and IR spectroscopy results indicate that N atoms are efficiently incorporated into the amorphous carbon network and can be found in different bonding environments, such as pyridinelike, graphitelike, nitrilelike, and amino groups. The nitrogenation of the films results in the formation of N-H bonding environments at the cost of C-H structures. Also, the insertion of N induces a higher fraction of double bonds in the structuremore » at the expense of the linear polymerlike chains, hence resulting in a more cross-linked solid. The formation of double bonds takes place through complex C=N structures and not by formation of graphitic aromatic rings. Also, the mechanical and tribological properties (hardness, friction, and wear) of the films have been studied as a function of the nitrogen content. Despite the major modifications in the bonding structure with nitrogen uptake, no significant changes in these properties are observed.« less

Authors:
; ; ; ; ;  [1];  [2];  [3];  [4];  [5]
  1. Instituto de Ciencia de Materiales de Madrid (ICMM-CSIC), C/ Sor Juana Ines de la Cruz 3, Cantoblanco, 28049 Madrid (Spain)
  2. (CMAM) and Departamento de Fisica Aplicada, Universidad Autonoma de Madrid, C/ Faraday 3, Cantoblanco, 28049 Madrid (Spain)
  3. (Belgium)
  4. (ICMM-CSIC), C/ Sor Juana Ines de la Cruz 3, Cantoblanco, 28049 Madrid (Spain)
  5. (ICTP-CSIC), Juan de la Cierva 3, 28006 Madrid (Spain)
Publication Date:
OSTI Identifier:
20982755
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 6; Other Information: DOI: 10.1063/1.2712142; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ABSORPTION; ABSORPTION SPECTROSCOPY; AMORPHOUS STATE; ARGON; BOUND STATE; CARBON NITRIDES; CHEMICAL VAPOR DEPOSITION; DOUBLE BONDS; ELECTRON CYCLOTRON-RESONANCE; FRICTION; GRAPHITE; HARDNESS; HYDROGEN; INFRARED SPECTRA; METHANE; NITROGEN; RUTHERFORD BACKSCATTERING SPECTROSCOPY; THIN FILMS; X-RAY SPECTROSCOPY

Citation Formats

Camero, M., Buijnsters, J. G., Gomez-Aleixandre, C., Gago, R., Caretti, I., Jimenez, I., Centro de Micro-Analisis de Materiales, Department of Physics, University of Antwerp, Campus Drie Eiken, Universiteitsplein 1, 2610 Wilrijk, Instituto de Ciencia de Materiales de Madrid, and Instituto de Ciencia y Tecnologia de Polimeros. The effect of nitrogen incorporation on the bonding structure of hydrogenated carbon nitride films. United States: N. p., 2007. Web. doi:10.1063/1.2712142.
Camero, M., Buijnsters, J. G., Gomez-Aleixandre, C., Gago, R., Caretti, I., Jimenez, I., Centro de Micro-Analisis de Materiales, Department of Physics, University of Antwerp, Campus Drie Eiken, Universiteitsplein 1, 2610 Wilrijk, Instituto de Ciencia de Materiales de Madrid, & Instituto de Ciencia y Tecnologia de Polimeros. The effect of nitrogen incorporation on the bonding structure of hydrogenated carbon nitride films. United States. doi:10.1063/1.2712142.
Camero, M., Buijnsters, J. G., Gomez-Aleixandre, C., Gago, R., Caretti, I., Jimenez, I., Centro de Micro-Analisis de Materiales, Department of Physics, University of Antwerp, Campus Drie Eiken, Universiteitsplein 1, 2610 Wilrijk, Instituto de Ciencia de Materiales de Madrid, and Instituto de Ciencia y Tecnologia de Polimeros. Thu . "The effect of nitrogen incorporation on the bonding structure of hydrogenated carbon nitride films". United States. doi:10.1063/1.2712142.
@article{osti_20982755,
title = {The effect of nitrogen incorporation on the bonding structure of hydrogenated carbon nitride films},
author = {Camero, M. and Buijnsters, J. G. and Gomez-Aleixandre, C. and Gago, R. and Caretti, I. and Jimenez, I. and Centro de Micro-Analisis de Materiales and Department of Physics, University of Antwerp, Campus Drie Eiken, Universiteitsplein 1, 2610 Wilrijk and Instituto de Ciencia de Materiales de Madrid and Instituto de Ciencia y Tecnologia de Polimeros},
abstractNote = {This work describes the composition and bonding structure of hydrogenated carbon nitride (a-CN{sub x}:H) films synthesized by electron cyclotron resonance chemical vapor deposition using as precursor gases argon, methane, and nitrogen. The composition of the films was derived from Rutherford backscattering and elastic recoil detection analysis and the bonding structure was examined by infrared (IR) spectroscopy and x-ray absorption near edge spectroscopy (XANES). By varying the nitrogen to methane ratio in the applied gas mixture, polymeric a-CN{sub x}:H films with N/C contents varying from 0.06 to 0.49 were obtained. Remarkably, the H content of the films ({approx}40 at. %) was rather unaffected by the nitrogenation process. The different bonding states as detected in the measured XANES C(1s) and N(1s) spectra have been correlated with those of a large number of reference samples. The XANES and IR spectroscopy results indicate that N atoms are efficiently incorporated into the amorphous carbon network and can be found in different bonding environments, such as pyridinelike, graphitelike, nitrilelike, and amino groups. The nitrogenation of the films results in the formation of N-H bonding environments at the cost of C-H structures. Also, the insertion of N induces a higher fraction of double bonds in the structure at the expense of the linear polymerlike chains, hence resulting in a more cross-linked solid. The formation of double bonds takes place through complex C=N structures and not by formation of graphitic aromatic rings. Also, the mechanical and tribological properties (hardness, friction, and wear) of the films have been studied as a function of the nitrogen content. Despite the major modifications in the bonding structure with nitrogen uptake, no significant changes in these properties are observed.},
doi = {10.1063/1.2712142},
journal = {Journal of Applied Physics},
number = 6,
volume = 101,
place = {United States},
year = {Thu Mar 15 00:00:00 EDT 2007},
month = {Thu Mar 15 00:00:00 EDT 2007}
}