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Title: X-ray waveguide nanostructures: Design, fabrication, and characterization

Abstract

Two dimensionally confining x-ray channel waveguide structures are fabricated and used for the delivery of nanoscopic x-ray beams. The waveguides can be combined with a high gain Kirkpatrick-Baez-prefocusing mirror system yielding hard x-ray beams with a cross section down to 25 nm (full width at half maximum). The incoming synchrotron x-ray beam is coupled in from the front side of the waveguide. Here we address the general design of the x-ray optical devices and their fabrication by e-beam lithography methods.

Authors:
; ; ; ; ;  [1];  [2];  [3]
  1. Institute for X-ray physics, Georg-August University Goettingen, D37077 Goettingen (Germany)
  2. (Switzerland)
  3. (Germany)
Publication Date:
OSTI Identifier:
20982732
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 5; Other Information: DOI: 10.1063/1.2435943; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; CROSS SECTIONS; ELECTRON BEAMS; FABRICATION; HARD X RADIATION; NANOSTRUCTURES; WAVEGUIDES

Citation Formats

Jarre, A., Seeger, J., Ollinger, C., Fuhse, C., David, C., Salditt, T., Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, 5232 Villigen, and Institute for X-ray Physics, Georg-August University Goettingen, D-37077 Goettingen. X-ray waveguide nanostructures: Design, fabrication, and characterization. United States: N. p., 2007. Web. doi:10.1063/1.2435943.
Jarre, A., Seeger, J., Ollinger, C., Fuhse, C., David, C., Salditt, T., Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, 5232 Villigen, & Institute for X-ray Physics, Georg-August University Goettingen, D-37077 Goettingen. X-ray waveguide nanostructures: Design, fabrication, and characterization. United States. doi:10.1063/1.2435943.
Jarre, A., Seeger, J., Ollinger, C., Fuhse, C., David, C., Salditt, T., Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, 5232 Villigen, and Institute for X-ray Physics, Georg-August University Goettingen, D-37077 Goettingen. Thu . "X-ray waveguide nanostructures: Design, fabrication, and characterization". United States. doi:10.1063/1.2435943.
@article{osti_20982732,
title = {X-ray waveguide nanostructures: Design, fabrication, and characterization},
author = {Jarre, A. and Seeger, J. and Ollinger, C. and Fuhse, C. and David, C. and Salditt, T. and Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, 5232 Villigen and Institute for X-ray Physics, Georg-August University Goettingen, D-37077 Goettingen},
abstractNote = {Two dimensionally confining x-ray channel waveguide structures are fabricated and used for the delivery of nanoscopic x-ray beams. The waveguides can be combined with a high gain Kirkpatrick-Baez-prefocusing mirror system yielding hard x-ray beams with a cross section down to 25 nm (full width at half maximum). The incoming synchrotron x-ray beam is coupled in from the front side of the waveguide. Here we address the general design of the x-ray optical devices and their fabrication by e-beam lithography methods.},
doi = {10.1063/1.2435943},
journal = {Journal of Applied Physics},
number = 5,
volume = 101,
place = {United States},
year = {Thu Mar 01 00:00:00 EST 2007},
month = {Thu Mar 01 00:00:00 EST 2007}
}