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Title: XPS studies on aluminum ions modified polyimide with the PIII technique

Abstract

Polyimide samples modified by aluminum (Al) ions produced by filtered cathodic vacuum arc (FCVA) with plasma immersion ion implantation (PIII) technique, under ambient argon and oxygen gases (flow rate Ar:O{sub 2}=2:1) were investigated by x-ray photoelectron spectroscopy (XPS). The working pressure was about 8x10{sup -4} Torr and the plasma density was estimated to be 10{sup 9} ions/cm{sup 3}. The applied bias voltages were varied from 5 to 12.5 kV but with fixed frequency at 900 Hz and duty time of 15 {mu}s. For 1 min process time, C 1s and O 1s spectra for modified samples clearly indicated that the carbonyl group (C=O) was largely destroyed by incident Al ions while Al 2p spectra suggested Al atoms remain inside polyimide matrices in the form of C-O-Al complexes. For a 5 min process time, when the ion fluence became large, both C 1s and O 1s spectra suggested a structure of aluminum oxide-mixed layer-polyimide and Al 2p spectra confirmed that most Al atoms were bonded to oxygen atoms on the top surface. These XPS results revealed the chemical bonds between implanted and deposited Al ions and polyimide matrix by using the PIII technique. The structural information can also be suggested. Furthermoremore » in this paper, some discussions with the theoretical [the stopping and range of ions in matter (SRIM)] simulation were also mentioned in order to explore the effectiveness of Al ions irradiation on polyimide.« less

Authors:
; ; ; ;  [1];  [2];  [2]
  1. School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798 (Singapore)
  2. (Singapore)
Publication Date:
OSTI Identifier:
20982716
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 5; Other Information: DOI: 10.1063/1.2709578; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; ALUMINIUM COMPLEXES; ALUMINIUM IONS; ALUMINIUM OXIDES; ARGON; CARBONYLS; CHEMICAL BONDS; FLOW RATE; ION BEAMS; ION IMPLANTATION; OXYGEN; PLASMA; PLASMA DENSITY; POLYMERS; SIMULATION; SPECTRA; X-RAY PHOTOELECTRON SPECTROSCOPY

Citation Formats

Han, Zhao Jun, Tay, Beng Kang, Ha, Peter C.T., Sze, Jia Yin, Chua, Daniel H.C., Data Storage Institute, Singapore 117608, and School of Material Science and Engineering, National University of Singapore, Singapore 117576. XPS studies on aluminum ions modified polyimide with the PIII technique. United States: N. p., 2007. Web. doi:10.1063/1.2709578.
Han, Zhao Jun, Tay, Beng Kang, Ha, Peter C.T., Sze, Jia Yin, Chua, Daniel H.C., Data Storage Institute, Singapore 117608, & School of Material Science and Engineering, National University of Singapore, Singapore 117576. XPS studies on aluminum ions modified polyimide with the PIII technique. United States. doi:10.1063/1.2709578.
Han, Zhao Jun, Tay, Beng Kang, Ha, Peter C.T., Sze, Jia Yin, Chua, Daniel H.C., Data Storage Institute, Singapore 117608, and School of Material Science and Engineering, National University of Singapore, Singapore 117576. Thu . "XPS studies on aluminum ions modified polyimide with the PIII technique". United States. doi:10.1063/1.2709578.
@article{osti_20982716,
title = {XPS studies on aluminum ions modified polyimide with the PIII technique},
author = {Han, Zhao Jun and Tay, Beng Kang and Ha, Peter C.T. and Sze, Jia Yin and Chua, Daniel H.C. and Data Storage Institute, Singapore 117608 and School of Material Science and Engineering, National University of Singapore, Singapore 117576},
abstractNote = {Polyimide samples modified by aluminum (Al) ions produced by filtered cathodic vacuum arc (FCVA) with plasma immersion ion implantation (PIII) technique, under ambient argon and oxygen gases (flow rate Ar:O{sub 2}=2:1) were investigated by x-ray photoelectron spectroscopy (XPS). The working pressure was about 8x10{sup -4} Torr and the plasma density was estimated to be 10{sup 9} ions/cm{sup 3}. The applied bias voltages were varied from 5 to 12.5 kV but with fixed frequency at 900 Hz and duty time of 15 {mu}s. For 1 min process time, C 1s and O 1s spectra for modified samples clearly indicated that the carbonyl group (C=O) was largely destroyed by incident Al ions while Al 2p spectra suggested Al atoms remain inside polyimide matrices in the form of C-O-Al complexes. For a 5 min process time, when the ion fluence became large, both C 1s and O 1s spectra suggested a structure of aluminum oxide-mixed layer-polyimide and Al 2p spectra confirmed that most Al atoms were bonded to oxygen atoms on the top surface. These XPS results revealed the chemical bonds between implanted and deposited Al ions and polyimide matrix by using the PIII technique. The structural information can also be suggested. Furthermore in this paper, some discussions with the theoretical [the stopping and range of ions in matter (SRIM)] simulation were also mentioned in order to explore the effectiveness of Al ions irradiation on polyimide.},
doi = {10.1063/1.2709578},
journal = {Journal of Applied Physics},
number = 5,
volume = 101,
place = {United States},
year = {Thu Mar 01 00:00:00 EST 2007},
month = {Thu Mar 01 00:00:00 EST 2007}
}