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Title: Numerical study of nanosecond laser interactions with micro-sized single droplets and sprays of xenon

Abstract

We present a thorough numerical study on interactions of a nanosecond laser with micro-sized xenon droplets. We developed a code which allows simulation of laser interactions with a single droplet as well as a spray. We give a detailed description of the code, and we present results on the dynamics of a microplasma produced by irradiation of a single xenon droplet with a laser focused at peak vacuum intensity in the 5x10{sup 10}-5x10{sup 12} W/cm{sup 2} range. We find that the heating of the plasma depends dramatically on the laser parameters (duration, pulse shape, and intensity) on one hand, and on the droplet diameter on the other. We also present results obtained with a spray which show that the dynamics of the microplasmas is very sensitive to the position of the droplets in the interaction volume. The predictions of our model agree well with recent experimental observations performed on laser-produced plasma sources for extreme ultraviolet lithography. In particular, the postprocessing of our data with a sophisticated atomic physics code has allowed us to reproduce quite well the spectrum emitted in the extreme ultraviolet range by a xenon plasma generated by laser irradiation of a spray of droplets.

Authors:
; ; ; ; ; ;  [1];  [2];  [3]
  1. Service des Photons, Atomes et Molecules, CEA-Saclay, 91191 Gif-sur-Yvette Cedex (France)
  2. (France)
  3. (Belgium)
Publication Date:
OSTI Identifier:
20982697
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 4; Other Information: DOI: 10.1063/1.2432870; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; COMPUTERIZED SIMULATION; DROPLETS; EXTREME ULTRAVIOLET RADIATION; LASER RADIATION; LASER-PRODUCED PLASMA; LASERS; NUMERICAL ANALYSIS; PLASMA HEATING; PLASMA PRODUCTION; PULSE SHAPERS; SPRAYS; XENON

Citation Formats

Auguste, T., Gaufridy de Dortan, F. de, Ceccotti, T., Hergott, J. F., Sublemontier, O., Descamps, D., Schmidt, M., Centre Lasers Intenses et Applications, Domaine du Haut-Carre, Universite Bordeaux I, 33405 Talence Cedex, and RTD.G4 'Nanosciences and Nanotechnologies' Commission Europeenne, European Commission CDMA 6, 127 Rue du Champ de Mars, Marsveldstraat 21 B-1049 Brussels. Numerical study of nanosecond laser interactions with micro-sized single droplets and sprays of xenon. United States: N. p., 2007. Web. doi:10.1063/1.2432870.
Auguste, T., Gaufridy de Dortan, F. de, Ceccotti, T., Hergott, J. F., Sublemontier, O., Descamps, D., Schmidt, M., Centre Lasers Intenses et Applications, Domaine du Haut-Carre, Universite Bordeaux I, 33405 Talence Cedex, & RTD.G4 'Nanosciences and Nanotechnologies' Commission Europeenne, European Commission CDMA 6, 127 Rue du Champ de Mars, Marsveldstraat 21 B-1049 Brussels. Numerical study of nanosecond laser interactions with micro-sized single droplets and sprays of xenon. United States. doi:10.1063/1.2432870.
Auguste, T., Gaufridy de Dortan, F. de, Ceccotti, T., Hergott, J. F., Sublemontier, O., Descamps, D., Schmidt, M., Centre Lasers Intenses et Applications, Domaine du Haut-Carre, Universite Bordeaux I, 33405 Talence Cedex, and RTD.G4 'Nanosciences and Nanotechnologies' Commission Europeenne, European Commission CDMA 6, 127 Rue du Champ de Mars, Marsveldstraat 21 B-1049 Brussels. Thu . "Numerical study of nanosecond laser interactions with micro-sized single droplets and sprays of xenon". United States. doi:10.1063/1.2432870.
@article{osti_20982697,
title = {Numerical study of nanosecond laser interactions with micro-sized single droplets and sprays of xenon},
author = {Auguste, T. and Gaufridy de Dortan, F. de and Ceccotti, T. and Hergott, J. F. and Sublemontier, O. and Descamps, D. and Schmidt, M. and Centre Lasers Intenses et Applications, Domaine du Haut-Carre, Universite Bordeaux I, 33405 Talence Cedex and RTD.G4 'Nanosciences and Nanotechnologies' Commission Europeenne, European Commission CDMA 6, 127 Rue du Champ de Mars, Marsveldstraat 21 B-1049 Brussels},
abstractNote = {We present a thorough numerical study on interactions of a nanosecond laser with micro-sized xenon droplets. We developed a code which allows simulation of laser interactions with a single droplet as well as a spray. We give a detailed description of the code, and we present results on the dynamics of a microplasma produced by irradiation of a single xenon droplet with a laser focused at peak vacuum intensity in the 5x10{sup 10}-5x10{sup 12} W/cm{sup 2} range. We find that the heating of the plasma depends dramatically on the laser parameters (duration, pulse shape, and intensity) on one hand, and on the droplet diameter on the other. We also present results obtained with a spray which show that the dynamics of the microplasmas is very sensitive to the position of the droplets in the interaction volume. The predictions of our model agree well with recent experimental observations performed on laser-produced plasma sources for extreme ultraviolet lithography. In particular, the postprocessing of our data with a sophisticated atomic physics code has allowed us to reproduce quite well the spectrum emitted in the extreme ultraviolet range by a xenon plasma generated by laser irradiation of a spray of droplets.},
doi = {10.1063/1.2432870},
journal = {Journal of Applied Physics},
number = 4,
volume = 101,
place = {United States},
year = {Thu Feb 15 00:00:00 EST 2007},
month = {Thu Feb 15 00:00:00 EST 2007}
}
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