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Title: Large-scale aligned silicon carbonitride nanotube arrays: Synthesis, characterization, and field emission property

Abstract

Large-scale aligned silicon carbonitride (SiCN) nanotube arrays have been synthesized by microwave-plasma-assisted chemical vapor deposition using SiH{sub 4}, CH{sub 4}, and N{sub 2} as precursors. The three elements of Si, C, and N are chemically bonded with each other and the nanotube composition can be adjusted by varying the SiH{sub 4} concentration, as revealed by electron energy loss spectroscopy and x-ray photoelectron spectroscopy. The evolution of microstructure of the SiCN nanotubes with different Si concentrations was characterized by high-resolution transmission electron microscopy and Raman spectroscopy. The dependence of field emission characteristics of the SiCN nanotubes on the composition has been investigated. With the increasing Si concentration, the SiCN nanotube exhibits more favorable oxidation resistance, which suggests that SiCN nanotube is a promising candidate as stable field emitter.

Authors:
; ; ; ; ; ; ; ;  [1];  [2];  [2]
  1. Institute of Physics, Chinese Academy of Sciences, Beijing 100080 (China) and Department of Physics, Wuhan University, Wuhan 430072 (China)
  2. (China)
Publication Date:
OSTI Identifier:
20979421
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Applied Physics; Journal Volume: 101; Journal Issue: 11; Other Information: DOI: 10.1063/1.2738378; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CHEMICAL VAPOR DEPOSITION; ENERGY-LOSS SPECTROSCOPY; FIELD EMISSION; METHANE; MICROSTRUCTURE; NANOTUBES; NITROGEN; OXIDATION; PRECURSOR; RAMAN SPECTROSCOPY; SILANES; SILICON CARBIDES; SILICON NITRIDES; SYNTHESIS; TRANSMISSION ELECTRON MICROSCOPY; X-RAY PHOTOELECTRON SPECTROSCOPY

Citation Formats

Liao, L., Xu, Z., Liu, K. H., Wang, W. L., Liu, S., Bai, X. D., Wang, E. G., Li, J. C., Liu, C., Institute of Physics, Chinese Academy of Sciences, Beijing 100080, and Department of Physics, Wuhan University, Wuhan 430072. Large-scale aligned silicon carbonitride nanotube arrays: Synthesis, characterization, and field emission property. United States: N. p., 2007. Web. doi:10.1063/1.2738378.
Liao, L., Xu, Z., Liu, K. H., Wang, W. L., Liu, S., Bai, X. D., Wang, E. G., Li, J. C., Liu, C., Institute of Physics, Chinese Academy of Sciences, Beijing 100080, & Department of Physics, Wuhan University, Wuhan 430072. Large-scale aligned silicon carbonitride nanotube arrays: Synthesis, characterization, and field emission property. United States. doi:10.1063/1.2738378.
Liao, L., Xu, Z., Liu, K. H., Wang, W. L., Liu, S., Bai, X. D., Wang, E. G., Li, J. C., Liu, C., Institute of Physics, Chinese Academy of Sciences, Beijing 100080, and Department of Physics, Wuhan University, Wuhan 430072. Fri . "Large-scale aligned silicon carbonitride nanotube arrays: Synthesis, characterization, and field emission property". United States. doi:10.1063/1.2738378.
@article{osti_20979421,
title = {Large-scale aligned silicon carbonitride nanotube arrays: Synthesis, characterization, and field emission property},
author = {Liao, L. and Xu, Z. and Liu, K. H. and Wang, W. L. and Liu, S. and Bai, X. D. and Wang, E. G. and Li, J. C. and Liu, C. and Institute of Physics, Chinese Academy of Sciences, Beijing 100080 and Department of Physics, Wuhan University, Wuhan 430072},
abstractNote = {Large-scale aligned silicon carbonitride (SiCN) nanotube arrays have been synthesized by microwave-plasma-assisted chemical vapor deposition using SiH{sub 4}, CH{sub 4}, and N{sub 2} as precursors. The three elements of Si, C, and N are chemically bonded with each other and the nanotube composition can be adjusted by varying the SiH{sub 4} concentration, as revealed by electron energy loss spectroscopy and x-ray photoelectron spectroscopy. The evolution of microstructure of the SiCN nanotubes with different Si concentrations was characterized by high-resolution transmission electron microscopy and Raman spectroscopy. The dependence of field emission characteristics of the SiCN nanotubes on the composition has been investigated. With the increasing Si concentration, the SiCN nanotube exhibits more favorable oxidation resistance, which suggests that SiCN nanotube is a promising candidate as stable field emitter.},
doi = {10.1063/1.2738378},
journal = {Journal of Applied Physics},
number = 11,
volume = 101,
place = {United States},
year = {Fri Jun 01 00:00:00 EDT 2007},
month = {Fri Jun 01 00:00:00 EDT 2007}
}
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