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Title: Inverted-magnetron cold-cathode gauge in hybrid-discharge mode

Abstract

In high-vacuum measurement, cold-cathode ionization gauges have been widely used due to their unique advantages such as being simple and robust, low outgassing, x-ray effects, and so on. But during the measuring process, they show that a considerable pump effect, contamination buildup, and the heating and sputtering of the electrode surface from discharge can also become a serious problem at higher measured pressures. In such circumstances, pulsed operation is a good solution. However, the lowest measurable pressure of cold-cathode ionization gauges in pulsed operation is hard to extend, which limits its application. But if the measurable range of the cold-cathode gauge is divided into two regions, the low-pressure region where it is operated in dc discharge mode to ensure its lowest measurable pressure and the high-pressure region where it is operated in pulsed-discharge mode to reduce its above disadvantages at high pressures, the problem can be well solved. This article describes a pulsed high-voltage generating circuit controlled by a single-chip CPU to perform such a hybrid discharge in an inverted-magnetron gauge. With this circuit, the following problems of an inverted-magnetron gauge were investigated: the difference between pulsed-discharged mode and dc discharge mode, one method of extending the low measurable pressuremore » limit in pulsed-discharge mode, the volt-current characteristics at different pressures, and constant-current pulsed-discharge measurement at pressures above 2x10{sup -2} Pa.« less

Authors:
;  [1]
  1. School of Electrical Engineering, Beijing Jiaotong University, 100044 Beijing (China)
Publication Date:
OSTI Identifier:
20979386
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films; Journal Volume: 25; Journal Issue: 2; Other Information: DOI: 10.1116/1.2464122; (c) 2007 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
75 CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; CATHODES; ELECTRIC CURRENTS; ELECTRIC POTENTIAL; HEATING; HYBRIDIZATION; IONIZATION; IONIZATION GAGES; MAGNETRONS; PRESSURE RANGE MEGA PA 10-100; SPUTTERING; SURFACES

Citation Formats

Mao Huiyong, and Wang Yi. Inverted-magnetron cold-cathode gauge in hybrid-discharge mode. United States: N. p., 2007. Web. doi:10.1116/1.2464122.
Mao Huiyong, & Wang Yi. Inverted-magnetron cold-cathode gauge in hybrid-discharge mode. United States. doi:10.1116/1.2464122.
Mao Huiyong, and Wang Yi. Thu . "Inverted-magnetron cold-cathode gauge in hybrid-discharge mode". United States. doi:10.1116/1.2464122.
@article{osti_20979386,
title = {Inverted-magnetron cold-cathode gauge in hybrid-discharge mode},
author = {Mao Huiyong and Wang Yi},
abstractNote = {In high-vacuum measurement, cold-cathode ionization gauges have been widely used due to their unique advantages such as being simple and robust, low outgassing, x-ray effects, and so on. But during the measuring process, they show that a considerable pump effect, contamination buildup, and the heating and sputtering of the electrode surface from discharge can also become a serious problem at higher measured pressures. In such circumstances, pulsed operation is a good solution. However, the lowest measurable pressure of cold-cathode ionization gauges in pulsed operation is hard to extend, which limits its application. But if the measurable range of the cold-cathode gauge is divided into two regions, the low-pressure region where it is operated in dc discharge mode to ensure its lowest measurable pressure and the high-pressure region where it is operated in pulsed-discharge mode to reduce its above disadvantages at high pressures, the problem can be well solved. This article describes a pulsed high-voltage generating circuit controlled by a single-chip CPU to perform such a hybrid discharge in an inverted-magnetron gauge. With this circuit, the following problems of an inverted-magnetron gauge were investigated: the difference between pulsed-discharged mode and dc discharge mode, one method of extending the low measurable pressure limit in pulsed-discharge mode, the volt-current characteristics at different pressures, and constant-current pulsed-discharge measurement at pressures above 2x10{sup -2} Pa.},
doi = {10.1116/1.2464122},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
number = 2,
volume = 25,
place = {United States},
year = {Thu Mar 15 00:00:00 EDT 2007},
month = {Thu Mar 15 00:00:00 EDT 2007}
}