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Title: Quantitative evaluation of film thickness uniformity: Application to off-axis magnetron source onto a rotating substrate

Abstract

To predict the thin film thickness distribution in a quantitative way, a theoretical calculation was conducted according to the cosine law approach for off-axis sputtering. The numerical calculation was focused on the optimal geometry instead of the thickness distribution itself, which took into account several variables including the target-to-substrate distance, the off-axis displacement, the emission characteristic, the width of the erosion groove, and the film thickness requirement. The effects of these variables on the optimal geometry were analyzed individually and the subsequent combined equations for optimal geometry were summarized. Thus, the combined equations were multivariable functions. These equations were simple and general and could be applied directly. For many situations, these equations eliminate the need to perform the complex, detailed calculation otherwise needed for each deposition geometry variant.

Authors:
; ; ; ;  [1]
  1. State Key Lab of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China (UESTC), Chengdu, 610054 (China) and School of Optoelectronic Information, University of Electronic Science and Technology of China (UESTC), Chengdu, 610054 (China)
Publication Date:
OSTI Identifier:
20979380
Resource Type:
Journal Article
Resource Relation:
Journal Name: Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films; Journal Volume: 25; Journal Issue: 2; Other Information: DOI: 10.1116/1.2429677; (c) 2007 American Vacuum Society; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; DISTRIBUTION; EQUATIONS; GEOMETRY; MAGNETRONS; SPUTTERING; SUBSTRATES; SURFACE COATING; THICKNESS; THIN FILMS

Citation Formats

Du, X. S., Jiang, Y. D., Yu, J. S., Li, J., and Xie, G. Z. Quantitative evaluation of film thickness uniformity: Application to off-axis magnetron source onto a rotating substrate. United States: N. p., 2007. Web. doi:10.1116/1.2429677.
Du, X. S., Jiang, Y. D., Yu, J. S., Li, J., & Xie, G. Z. Quantitative evaluation of film thickness uniformity: Application to off-axis magnetron source onto a rotating substrate. United States. doi:10.1116/1.2429677.
Du, X. S., Jiang, Y. D., Yu, J. S., Li, J., and Xie, G. Z. Thu . "Quantitative evaluation of film thickness uniformity: Application to off-axis magnetron source onto a rotating substrate". United States. doi:10.1116/1.2429677.
@article{osti_20979380,
title = {Quantitative evaluation of film thickness uniformity: Application to off-axis magnetron source onto a rotating substrate},
author = {Du, X. S. and Jiang, Y. D. and Yu, J. S. and Li, J. and Xie, G. Z.},
abstractNote = {To predict the thin film thickness distribution in a quantitative way, a theoretical calculation was conducted according to the cosine law approach for off-axis sputtering. The numerical calculation was focused on the optimal geometry instead of the thickness distribution itself, which took into account several variables including the target-to-substrate distance, the off-axis displacement, the emission characteristic, the width of the erosion groove, and the film thickness requirement. The effects of these variables on the optimal geometry were analyzed individually and the subsequent combined equations for optimal geometry were summarized. Thus, the combined equations were multivariable functions. These equations were simple and general and could be applied directly. For many situations, these equations eliminate the need to perform the complex, detailed calculation otherwise needed for each deposition geometry variant.},
doi = {10.1116/1.2429677},
journal = {Journal of Vacuum Science and Technology. A, International Journal Devoted to Vacuum, Surfaces, and Films},
number = 2,
volume = 25,
place = {United States},
year = {Thu Mar 15 00:00:00 EDT 2007},
month = {Thu Mar 15 00:00:00 EDT 2007}
}
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