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Title: Quantitative phase retrieval in transmission hard x-ray microscope

Abstract

Quantitative phase retrieval with a sub-100-nm resolution is achieved from micrographs of a zone plate based transmission x-ray microscope. A plastic zone plate containing objects of sizes from micrometers down to tens of nanometers is used as a test sample to quantify the retrieved phase. Utilizing the focal serial images in the image plane, the phase information is retrieved quantitatively across the entire range of sizes by combining the transport intensity equation and self-consistent wave propagation methods in this partial coherence system. The study demonstrates a solution to overcome the deficiency encountered in the two phase retrieval approaches.

Authors:
; ; ; ;  [1];  [2]
  1. National Synchrotron Radiation Research Center, 101 Hsin-Ann Road, Hsinchu 30076, Taiwan (China) and Department of Photonics, National Chiao Tung University, Hsinchu 300, Taiwan (China) and Display Institute, National Chiao Tung University, Hsinchu 300, Taiwan (China) and Department of Engineering and System Science, National Tsing Hua University, Hsinchu 30076, Taiwan (China)
  2. (China)
Publication Date:
OSTI Identifier:
20971892
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 18; Other Information: DOI: 10.1063/1.2724066; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; EQUATIONS; HARD X RADIATION; IMAGES; MICROSCOPES; MICROSCOPY; OPTICS; PLASTICS; PLATES; RESOLUTION; WAVE PROPAGATION

Citation Formats

Yin, G.-C., Chen, F.-R., Hwu, Y., Shieh, H.-P.D., Liang, K.S., and Institute of Physics, Academia Sinica, 128 Sec. 2, Nankang, Taipei 115, Taiwan. Quantitative phase retrieval in transmission hard x-ray microscope. United States: N. p., 2007. Web. doi:10.1063/1.2724066.
Yin, G.-C., Chen, F.-R., Hwu, Y., Shieh, H.-P.D., Liang, K.S., & Institute of Physics, Academia Sinica, 128 Sec. 2, Nankang, Taipei 115, Taiwan. Quantitative phase retrieval in transmission hard x-ray microscope. United States. doi:10.1063/1.2724066.
Yin, G.-C., Chen, F.-R., Hwu, Y., Shieh, H.-P.D., Liang, K.S., and Institute of Physics, Academia Sinica, 128 Sec. 2, Nankang, Taipei 115, Taiwan. Mon . "Quantitative phase retrieval in transmission hard x-ray microscope". United States. doi:10.1063/1.2724066.
@article{osti_20971892,
title = {Quantitative phase retrieval in transmission hard x-ray microscope},
author = {Yin, G.-C. and Chen, F.-R. and Hwu, Y. and Shieh, H.-P.D. and Liang, K.S. and Institute of Physics, Academia Sinica, 128 Sec. 2, Nankang, Taipei 115, Taiwan},
abstractNote = {Quantitative phase retrieval with a sub-100-nm resolution is achieved from micrographs of a zone plate based transmission x-ray microscope. A plastic zone plate containing objects of sizes from micrometers down to tens of nanometers is used as a test sample to quantify the retrieved phase. Utilizing the focal serial images in the image plane, the phase information is retrieved quantitatively across the entire range of sizes by combining the transport intensity equation and self-consistent wave propagation methods in this partial coherence system. The study demonstrates a solution to overcome the deficiency encountered in the two phase retrieval approaches.},
doi = {10.1063/1.2724066},
journal = {Applied Physics Letters},
number = 18,
volume = 90,
place = {United States},
year = {Mon Apr 30 00:00:00 EDT 2007},
month = {Mon Apr 30 00:00:00 EDT 2007}
}
  • We obtain quantitative phase reconstructions from differential phase contrast images obtained with a scanning transmission x-ray microscope and 2.5 keV x rays. The theoretical basis of the technique is presented along with measurements and their interpretation.
  • We obtain quantitative phase reconstructions from differential phase contrast images obtained with a scanning transmission x-ray microscope and 2.5 keV x rays. The theoretical basis of the technique is presented along with measurements and their interpretation.
  • Measuring the deviation of a wavefront from a sphere provides valuable feedback on lens alignment and manufacturing errors. We demonstrate that these aberrations can be accurately measured at hard x-ray wavelengths, from far-field intensity measurements, using phase retrieval with a moveable structure in the beam path. We induce aberrations on a hard x-ray kinoform lens through deliberate misalignment and show that the reconstructed wavefronts are in good agreement with numerical simulations. Reconstructions from independent data, with the structure at different longitudinal positions and significantly separated from the beam focus, agreed with a root mean squared error of 0.006 waves.
  • Measuring the deviation of a wavefront from a sphere provides valuable feedback on lens alignment and manufacturing errors. We demonstrate that these aberrations can be accurately measured at hard x-ray wavelengths, from far-field intensity measurements, using phase retrieval with a moveable structure in the beam path. We induce aberrations on a hard x-ray kinoform lens through deliberate misalignment and show that the reconstructed wavefronts are in good agreement with numerical simulations. Reconstructions from independent data, with the structure at different longitudinal positions and significantly separated from the beam focus, agreed with a root mean squared error of 0.006 waves.