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Title: Fluorine effects on the dipole structures of the Al{sub 2}O{sub 3} thin films and characterization by spectroscopic ellipsometry

Abstract

Fluorine-terminated chemical bonds and dipole structures within an Al{sub 2}O{sub 3} layer were investigated in this study. Spectroscopic ellipsometry (SE) was employed to estimate the characteristics of fluorinated Al{sub 2}O{sub 3}. The parameters S{sub 0} and {lambda}{sub 0} extracted from SE were analyzed to detect the influence of F-terminated bonding. Al-O bonds were replaced by the Al-F bonds after fluorine was implanted on the silicon substrate. A physical model of dipole structures was proposed explaining the F incorporation phenomenon.

Authors:
; ; ; ; ;  [1];  [2];  [2]
  1. Department of Electronic Engineering, Chang Gung University, 259 Wen-Hwa 1st Rd., Kwei-Shan, Tao-Yuan 333, Taiwan (China)
  2. (China)
Publication Date:
OSTI Identifier:
20971880
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 17; Other Information: DOI: 10.1063/1.2730581; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALUMINIUM OXIDES; CHEMICAL BONDS; DIELECTRIC MATERIALS; DIPOLES; ELLIPSOMETRY; FLUORINE; ION IMPLANTATION; LAYERS; PLASMA; SILICON; SUBSTRATES; THIN FILMS

Citation Formats

Lai, C.S., Fan, K.M., Peng, H.K., Lin, S.J., Lee, C.Y., Ai, C.F., Nanya Technology Corporation, Hwa-Ya Technology Park, 669 Fu-Hsing 3rd Rd., Kwei-Shan, Tao-Yuan 333, Taiwan, and Institute of Nuclear Energy Research, Atomic Energy Council, No. 1000, Wenhua Rd., Lungtan, Taoyuan 325, Taiwan. Fluorine effects on the dipole structures of the Al{sub 2}O{sub 3} thin films and characterization by spectroscopic ellipsometry. United States: N. p., 2007. Web. doi:10.1063/1.2730581.
Lai, C.S., Fan, K.M., Peng, H.K., Lin, S.J., Lee, C.Y., Ai, C.F., Nanya Technology Corporation, Hwa-Ya Technology Park, 669 Fu-Hsing 3rd Rd., Kwei-Shan, Tao-Yuan 333, Taiwan, & Institute of Nuclear Energy Research, Atomic Energy Council, No. 1000, Wenhua Rd., Lungtan, Taoyuan 325, Taiwan. Fluorine effects on the dipole structures of the Al{sub 2}O{sub 3} thin films and characterization by spectroscopic ellipsometry. United States. doi:10.1063/1.2730581.
Lai, C.S., Fan, K.M., Peng, H.K., Lin, S.J., Lee, C.Y., Ai, C.F., Nanya Technology Corporation, Hwa-Ya Technology Park, 669 Fu-Hsing 3rd Rd., Kwei-Shan, Tao-Yuan 333, Taiwan, and Institute of Nuclear Energy Research, Atomic Energy Council, No. 1000, Wenhua Rd., Lungtan, Taoyuan 325, Taiwan. Mon . "Fluorine effects on the dipole structures of the Al{sub 2}O{sub 3} thin films and characterization by spectroscopic ellipsometry". United States. doi:10.1063/1.2730581.
@article{osti_20971880,
title = {Fluorine effects on the dipole structures of the Al{sub 2}O{sub 3} thin films and characterization by spectroscopic ellipsometry},
author = {Lai, C.S. and Fan, K.M. and Peng, H.K. and Lin, S.J. and Lee, C.Y. and Ai, C.F. and Nanya Technology Corporation, Hwa-Ya Technology Park, 669 Fu-Hsing 3rd Rd., Kwei-Shan, Tao-Yuan 333, Taiwan and Institute of Nuclear Energy Research, Atomic Energy Council, No. 1000, Wenhua Rd., Lungtan, Taoyuan 325, Taiwan},
abstractNote = {Fluorine-terminated chemical bonds and dipole structures within an Al{sub 2}O{sub 3} layer were investigated in this study. Spectroscopic ellipsometry (SE) was employed to estimate the characteristics of fluorinated Al{sub 2}O{sub 3}. The parameters S{sub 0} and {lambda}{sub 0} extracted from SE were analyzed to detect the influence of F-terminated bonding. Al-O bonds were replaced by the Al-F bonds after fluorine was implanted on the silicon substrate. A physical model of dipole structures was proposed explaining the F incorporation phenomenon.},
doi = {10.1063/1.2730581},
journal = {Applied Physics Letters},
number = 17,
volume = 90,
place = {United States},
year = {Mon Apr 23 00:00:00 EDT 2007},
month = {Mon Apr 23 00:00:00 EDT 2007}
}