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Title: Production of a helium beam in a focused ion beam machine using an electron beam ion trap

Abstract

Gallium liquid-metal ion sources that have been introduced in the late 1970s have allowed the development of a new class of micro- and nanofabrication tools collectively denominated as focused ion beam (FIB) machines. To investigate the potential of a helium beam in such a FIB instrument the authors have tested a room-temperature electron beam ion trap coupled with a high resolution FIB machine. In this letter they present their first results in target imaging using a helium beam with a resolution that allows to account for a beam diameter in the submicrometer range.

Authors:
; ; ; ;  [1];  [2];  [3]
  1. DREEBIT GmbH, Zur Wetterwarte 50, D-01109 Dresden (Germany)
  2. (France)
  3. (Germany)
Publication Date:
OSTI Identifier:
20971851
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 8; Other Information: DOI: 10.1063/1.2454699; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 43 PARTICLE ACCELERATORS; ELECTRON BEAMS; GALLIUM; HELIUM 4 BEAMS; ION SOURCES; LIQUID METALS; NANOSTRUCTURES; PARTICLES; TEMPERATURE RANGE 0273-0400 K; TRAPPING

Citation Formats

Ullmann, F., Grossmann, F., Ovsyannikov, V. P., Gierak, J., Zschornack, G., LPN/CNRS, Route de Nozay, F-91460 Marcoussis, and Institut fuer Angewandte Physik, Technische Universitaet Dresden, Mommsenstr. 13, D-01062 Dresden. Production of a helium beam in a focused ion beam machine using an electron beam ion trap. United States: N. p., 2007. Web. doi:10.1063/1.2454699.
Ullmann, F., Grossmann, F., Ovsyannikov, V. P., Gierak, J., Zschornack, G., LPN/CNRS, Route de Nozay, F-91460 Marcoussis, & Institut fuer Angewandte Physik, Technische Universitaet Dresden, Mommsenstr. 13, D-01062 Dresden. Production of a helium beam in a focused ion beam machine using an electron beam ion trap. United States. doi:10.1063/1.2454699.
Ullmann, F., Grossmann, F., Ovsyannikov, V. P., Gierak, J., Zschornack, G., LPN/CNRS, Route de Nozay, F-91460 Marcoussis, and Institut fuer Angewandte Physik, Technische Universitaet Dresden, Mommsenstr. 13, D-01062 Dresden. Mon . "Production of a helium beam in a focused ion beam machine using an electron beam ion trap". United States. doi:10.1063/1.2454699.
@article{osti_20971851,
title = {Production of a helium beam in a focused ion beam machine using an electron beam ion trap},
author = {Ullmann, F. and Grossmann, F. and Ovsyannikov, V. P. and Gierak, J. and Zschornack, G. and LPN/CNRS, Route de Nozay, F-91460 Marcoussis and Institut fuer Angewandte Physik, Technische Universitaet Dresden, Mommsenstr. 13, D-01062 Dresden},
abstractNote = {Gallium liquid-metal ion sources that have been introduced in the late 1970s have allowed the development of a new class of micro- and nanofabrication tools collectively denominated as focused ion beam (FIB) machines. To investigate the potential of a helium beam in such a FIB instrument the authors have tested a room-temperature electron beam ion trap coupled with a high resolution FIB machine. In this letter they present their first results in target imaging using a helium beam with a resolution that allows to account for a beam diameter in the submicrometer range.},
doi = {10.1063/1.2454699},
journal = {Applied Physics Letters},
number = 8,
volume = 90,
place = {United States},
year = {Mon Feb 19 00:00:00 EST 2007},
month = {Mon Feb 19 00:00:00 EST 2007}
}