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Title: Discontinuous ion tracks on silicon oxide on silicon surfaces after grazing-angle heavy ion irradiation

Abstract

Thin silicon oxide layers on silicon have been characterized by atomic force microscopy before and after swift heavy ion irradiation with 0.63 MeV/u Pb ions at grazing angle of incidence. In this letter, the authors report the observation of extended intermittent tracks at the silicon oxide (SiO{sub 2}) surface. As a result, this raises the question of the discontinuous energy deposition at the nanometric scale. This experimental overlook is of major interest for nanostructuring and surface nanoprocessing as well as with regard to reliability of electronic components and systems.

Authors:
; ; ; ; ; ; ;  [1];  [2];  [2];  [2]
  1. IES, UMR-CNRS 5214, cc082, Universite Montpellier 2, 34095 Montpellier Cedex 5 (France)
  2. (France)
Publication Date:
OSTI Identifier:
20971830
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 7; Other Information: DOI: 10.1063/1.2591255; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ATOMIC FORCE MICROSCOPY; HEAVY IONS; INCIDENCE ANGLE; ION BEAMS; IRRADIATION; KEV RANGE 100-1000; LAYERS; LEAD IONS; NANOSTRUCTURES; PARTICLE TRACKS; SILICON; SILICON OXIDES

Citation Formats

Carvalho, A. M. J. F., Marinoni, M., Touboul, A. D., Guasch, C., Lebius, H., Ramonda, M., Bonnet, J., Saigne, F., CIRIL-GANIL, rue Claude Bloch, BP 5133, 14070 Caen Cedex 5, LMCP, cc082, Universite Montpellier 2, 34095 Montpellier Cedex 5, and IES, UMR-CNRS 5214, cc082, Universite Montpellier 2, 34095 Montpellier Cedex 5. Discontinuous ion tracks on silicon oxide on silicon surfaces after grazing-angle heavy ion irradiation. United States: N. p., 2007. Web. doi:10.1063/1.2591255.
Carvalho, A. M. J. F., Marinoni, M., Touboul, A. D., Guasch, C., Lebius, H., Ramonda, M., Bonnet, J., Saigne, F., CIRIL-GANIL, rue Claude Bloch, BP 5133, 14070 Caen Cedex 5, LMCP, cc082, Universite Montpellier 2, 34095 Montpellier Cedex 5, & IES, UMR-CNRS 5214, cc082, Universite Montpellier 2, 34095 Montpellier Cedex 5. Discontinuous ion tracks on silicon oxide on silicon surfaces after grazing-angle heavy ion irradiation. United States. doi:10.1063/1.2591255.
Carvalho, A. M. J. F., Marinoni, M., Touboul, A. D., Guasch, C., Lebius, H., Ramonda, M., Bonnet, J., Saigne, F., CIRIL-GANIL, rue Claude Bloch, BP 5133, 14070 Caen Cedex 5, LMCP, cc082, Universite Montpellier 2, 34095 Montpellier Cedex 5, and IES, UMR-CNRS 5214, cc082, Universite Montpellier 2, 34095 Montpellier Cedex 5. Mon . "Discontinuous ion tracks on silicon oxide on silicon surfaces after grazing-angle heavy ion irradiation". United States. doi:10.1063/1.2591255.
@article{osti_20971830,
title = {Discontinuous ion tracks on silicon oxide on silicon surfaces after grazing-angle heavy ion irradiation},
author = {Carvalho, A. M. J. F. and Marinoni, M. and Touboul, A. D. and Guasch, C. and Lebius, H. and Ramonda, M. and Bonnet, J. and Saigne, F. and CIRIL-GANIL, rue Claude Bloch, BP 5133, 14070 Caen Cedex 5 and LMCP, cc082, Universite Montpellier 2, 34095 Montpellier Cedex 5 and IES, UMR-CNRS 5214, cc082, Universite Montpellier 2, 34095 Montpellier Cedex 5},
abstractNote = {Thin silicon oxide layers on silicon have been characterized by atomic force microscopy before and after swift heavy ion irradiation with 0.63 MeV/u Pb ions at grazing angle of incidence. In this letter, the authors report the observation of extended intermittent tracks at the silicon oxide (SiO{sub 2}) surface. As a result, this raises the question of the discontinuous energy deposition at the nanometric scale. This experimental overlook is of major interest for nanostructuring and surface nanoprocessing as well as with regard to reliability of electronic components and systems.},
doi = {10.1063/1.2591255},
journal = {Applied Physics Letters},
number = 7,
volume = 90,
place = {United States},
year = {Mon Feb 12 00:00:00 EST 2007},
month = {Mon Feb 12 00:00:00 EST 2007}
}