200 femtometer sensitivity for near-field analysis of surface acoustic waves in a scanning electron / scanning probe microscope hybrid system

Journal Article · Mon Apr 02 00:00:00 EDT 2007 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2721123· OSTI ID:20960200

Thomas, Ch; Heiderhoff, R; Balk, L J ^[1]

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1. Lehrstuhl fuer Elektronik, Bergische Universitaet Wuppertal, Rainer-Gruenter-Str. 21, Wuppertal 42119 (Germany)

In the microscopic hybrid system, a combination of a scanning electron microscope with a scanning probe microscope, both microprobes are used for local generation and detection of acoustic waves in the near field. At the example of ferroelectric domain imaging, a sensitivity of 200 fm in the local detection of vertical surface oscillation is demonstrated whereas the spatial resolution is within several nanometers.

• OSTI ID: 20960200
• Journal Information: Applied Physics Letters, Vol. 90, Issue 14; Other Information: DOI: 10.1063/1.2721123; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY
ELECTRON SCANNING
FERROELECTRIC MATERIALS
HYBRID SYSTEMS
MICROSCOPES
SCANNING ELECTRON MICROSCOPY
SENSITIVITY
SOUND WAVES
SPATIAL RESOLUTION