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Title: 200 femtometer sensitivity for near-field analysis of surface acoustic waves in a scanning electron / scanning probe microscope hybrid system

Abstract

In the microscopic hybrid system, a combination of a scanning electron microscope with a scanning probe microscope, both microprobes are used for local generation and detection of acoustic waves in the near field. At the example of ferroelectric domain imaging, a sensitivity of 200 fm in the local detection of vertical surface oscillation is demonstrated whereas the spatial resolution is within several nanometers.

Authors:
; ;  [1]
  1. Lehrstuhl fuer Elektronik, Bergische Universitaet Wuppertal, Rainer-Gruenter-Str. 21, Wuppertal 42119 (Germany)
Publication Date:
OSTI Identifier:
20960200
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 14; Other Information: DOI: 10.1063/1.2721123; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ELECTRON SCANNING; FERROELECTRIC MATERIALS; HYBRID SYSTEMS; MICROSCOPES; SCANNING ELECTRON MICROSCOPY; SENSITIVITY; SOUND WAVES; SPATIAL RESOLUTION

Citation Formats

Thomas, Ch., Heiderhoff, R., and Balk, L. J. 200 femtometer sensitivity for near-field analysis of surface acoustic waves in a scanning electron / scanning probe microscope hybrid system. United States: N. p., 2007. Web. doi:10.1063/1.2721123.
Thomas, Ch., Heiderhoff, R., & Balk, L. J. 200 femtometer sensitivity for near-field analysis of surface acoustic waves in a scanning electron / scanning probe microscope hybrid system. United States. doi:10.1063/1.2721123.
Thomas, Ch., Heiderhoff, R., and Balk, L. J. Mon . "200 femtometer sensitivity for near-field analysis of surface acoustic waves in a scanning electron / scanning probe microscope hybrid system". United States. doi:10.1063/1.2721123.
@article{osti_20960200,
title = {200 femtometer sensitivity for near-field analysis of surface acoustic waves in a scanning electron / scanning probe microscope hybrid system},
author = {Thomas, Ch. and Heiderhoff, R. and Balk, L. J.},
abstractNote = {In the microscopic hybrid system, a combination of a scanning electron microscope with a scanning probe microscope, both microprobes are used for local generation and detection of acoustic waves in the near field. At the example of ferroelectric domain imaging, a sensitivity of 200 fm in the local detection of vertical surface oscillation is demonstrated whereas the spatial resolution is within several nanometers.},
doi = {10.1063/1.2721123},
journal = {Applied Physics Letters},
number = 14,
volume = 90,
place = {United States},
year = {Mon Apr 02 00:00:00 EDT 2007},
month = {Mon Apr 02 00:00:00 EDT 2007}
}