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Title: Highly efficient electron gun with a single-atom electron source

Abstract

The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; {approx}80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a Zr/O/W Schottky gun. At the pressure of less than 1x10{sup -9} Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.

Authors:
; ; ; ; ; ; ; ;  [1];  [2];  [2];  [2];  [3]
  1. Kagami Memorial Laboratory for Materials Science and Technology, Waseda University, 2-8-26 Nishi-waseda, Shinjuku, Tokyo 169-0051 (Japan)
  2. (Japan)
  3. (China)
Publication Date:
OSTI Identifier:
20960198
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 14; Other Information: DOI: 10.1063/1.2720348; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 43 PARTICLE ACCELERATORS; BEAM OPTICS; ELECTRON BEAMS; ELECTRON GUNS; ELECTRON SOURCES; FIELD EMISSION; SCANNING ELECTRON MICROSCOPY

Citation Formats

Ishikawa, Tsuyoshi, Urata, Tomohiro, Cho, Boklae, Rokuta, Eiji, Oshima, Chuhei, Terui, Yoshinori, Saito, Hidekazu, Yonezawa, Akira, Tsong, Tien T., DENKA Co., 1135 Nakamura, Shibukawa, Gunma 377-8520, APCO Co., Ltd., 522-10 Kitano, Hachioji, Tokyo 192-0906, HOLON Co., Ltd., 1026-1 Minami-nagai, Tokorozawa, Saitama 359-0011, and Institute of Physics, Academia Sinica, Nankang, Taipei, Taiwan 11529. Highly efficient electron gun with a single-atom electron source. United States: N. p., 2007. Web. doi:10.1063/1.2720348.
Ishikawa, Tsuyoshi, Urata, Tomohiro, Cho, Boklae, Rokuta, Eiji, Oshima, Chuhei, Terui, Yoshinori, Saito, Hidekazu, Yonezawa, Akira, Tsong, Tien T., DENKA Co., 1135 Nakamura, Shibukawa, Gunma 377-8520, APCO Co., Ltd., 522-10 Kitano, Hachioji, Tokyo 192-0906, HOLON Co., Ltd., 1026-1 Minami-nagai, Tokorozawa, Saitama 359-0011, & Institute of Physics, Academia Sinica, Nankang, Taipei, Taiwan 11529. Highly efficient electron gun with a single-atom electron source. United States. doi:10.1063/1.2720348.
Ishikawa, Tsuyoshi, Urata, Tomohiro, Cho, Boklae, Rokuta, Eiji, Oshima, Chuhei, Terui, Yoshinori, Saito, Hidekazu, Yonezawa, Akira, Tsong, Tien T., DENKA Co., 1135 Nakamura, Shibukawa, Gunma 377-8520, APCO Co., Ltd., 522-10 Kitano, Hachioji, Tokyo 192-0906, HOLON Co., Ltd., 1026-1 Minami-nagai, Tokorozawa, Saitama 359-0011, and Institute of Physics, Academia Sinica, Nankang, Taipei, Taiwan 11529. Mon . "Highly efficient electron gun with a single-atom electron source". United States. doi:10.1063/1.2720348.
@article{osti_20960198,
title = {Highly efficient electron gun with a single-atom electron source},
author = {Ishikawa, Tsuyoshi and Urata, Tomohiro and Cho, Boklae and Rokuta, Eiji and Oshima, Chuhei and Terui, Yoshinori and Saito, Hidekazu and Yonezawa, Akira and Tsong, Tien T. and DENKA Co., 1135 Nakamura, Shibukawa, Gunma 377-8520 and APCO Co., Ltd., 522-10 Kitano, Hachioji, Tokyo 192-0906 and HOLON Co., Ltd., 1026-1 Minami-nagai, Tokorozawa, Saitama 359-0011 and Institute of Physics, Academia Sinica, Nankang, Taipei, Taiwan 11529},
abstractNote = {The authors have demonstrated highly collimated electron-beam emission from a practical electron gun with a single-atom electron source; {approx}80% of the total emission current entered the electron optics. This ratio was two or three orders of magnitude higher than those of the conventional electron sources such as a cold field emission gun and a Zr/O/W Schottky gun. At the pressure of less than 1x10{sup -9} Pa, the authors observed stable emission of 20 nA, which generates the specimen current of 5 pA required for scanning electron microscopes.},
doi = {10.1063/1.2720348},
journal = {Applied Physics Letters},
number = 14,
volume = 90,
place = {United States},
year = {Mon Apr 02 00:00:00 EDT 2007},
month = {Mon Apr 02 00:00:00 EDT 2007}
}