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Title: Real-time optical monitoring of thin film growth by in situ pyrometry through multiple layers and effective media approximation modeling

Abstract

A model combining multiple layer description and effective media approximation is developed for pyrometry in the case of thin film synthesis, in order to estimate the film property evolution along its thickness during the growth process in real time. The model is used to investigate optical properties of polycrystalline diamond film prepared by H{sub 2}/CH{sub 4}/N{sub 2} microwave plasma. It is shown that in the presence of nitrogen, the growth is strongly nonhomogeneous. The deposit, initially composed of large amounts of void and nondiamond phases, evolves rapidly towards highest quality dense film where the diamond phase is predominant.

Authors:
; ;  [1];  [2];  [3]
  1. Laboratoire d'Ingenierie des Materiaux et des Hautes Pressions, UPR 1311 CNRS, Universite Paris 13, 99 avenue J. B. Clement, 93430 Villetaneuse (France)
  2. (United States)
  3. (France)
Publication Date:
OSTI Identifier:
20960187
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 13; Other Information: DOI: 10.1063/1.2717558; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; APPROXIMATIONS; CRYSTAL GROWTH; DEPOSITION; DIAMONDS; HYDROGEN; LAYERS; METHANE; MICROWAVE RADIATION; NITROGEN; PLASMA; POLYCRYSTALS; REFRACTIVE INDEX; SIMULATION; THICKNESS; THIN FILMS

Citation Formats

Benedic, F., Bruno, P., Pigeat, Ph., Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, Illinois 60439, and Laboratoire de Physique des Milieux Ionises et Applications, UMR 7040 CNRS, Universite Henri Poincare Nancy I, 54506 Vandoeuvre-les-Nancy. Real-time optical monitoring of thin film growth by in situ pyrometry through multiple layers and effective media approximation modeling. United States: N. p., 2007. Web. doi:10.1063/1.2717558.
Benedic, F., Bruno, P., Pigeat, Ph., Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, Illinois 60439, & Laboratoire de Physique des Milieux Ionises et Applications, UMR 7040 CNRS, Universite Henri Poincare Nancy I, 54506 Vandoeuvre-les-Nancy. Real-time optical monitoring of thin film growth by in situ pyrometry through multiple layers and effective media approximation modeling. United States. doi:10.1063/1.2717558.
Benedic, F., Bruno, P., Pigeat, Ph., Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, Illinois 60439, and Laboratoire de Physique des Milieux Ionises et Applications, UMR 7040 CNRS, Universite Henri Poincare Nancy I, 54506 Vandoeuvre-les-Nancy. Mon . "Real-time optical monitoring of thin film growth by in situ pyrometry through multiple layers and effective media approximation modeling". United States. doi:10.1063/1.2717558.
@article{osti_20960187,
title = {Real-time optical monitoring of thin film growth by in situ pyrometry through multiple layers and effective media approximation modeling},
author = {Benedic, F. and Bruno, P. and Pigeat, Ph. and Materials Science Division, Argonne National Laboratory, 9700 S. Cass Avenue, Argonne, Illinois 60439 and Laboratoire de Physique des Milieux Ionises et Applications, UMR 7040 CNRS, Universite Henri Poincare Nancy I, 54506 Vandoeuvre-les-Nancy},
abstractNote = {A model combining multiple layer description and effective media approximation is developed for pyrometry in the case of thin film synthesis, in order to estimate the film property evolution along its thickness during the growth process in real time. The model is used to investigate optical properties of polycrystalline diamond film prepared by H{sub 2}/CH{sub 4}/N{sub 2} microwave plasma. It is shown that in the presence of nitrogen, the growth is strongly nonhomogeneous. The deposit, initially composed of large amounts of void and nondiamond phases, evolves rapidly towards highest quality dense film where the diamond phase is predominant.},
doi = {10.1063/1.2717558},
journal = {Applied Physics Letters},
number = 13,
volume = 90,
place = {United States},
year = {Mon Mar 26 00:00:00 EDT 2007},
month = {Mon Mar 26 00:00:00 EDT 2007}
}