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Title: Fabrication and material properties of submicrometer SrTiO{sub 3} films exfoliated using crystal ion slicing

Abstract

The crystal quality of submicrometer-thick SrTiO{sub 3} films that are formed by exfoliation from bulk crystals using deep implantation with H-ion beams is investigated. Nuclear reaction analysis and Rutherford backscattering/channeling are used to measure the implantation depth, crystal-lattice disruption, and surface damage prior to exfoliation. The surface profiles of the exfoliated films are examined with atomic force microscopy; the roughness is shown to be reducible to subnanometer levels with postexfoliation mechanical polishing.

Authors:
; ; ; ; ; ;  [1];  [2];  [2]
  1. Microelectronic Sciences Laboratory, Columbia University, New York, New York 10027 (United States)
  2. (United States)
Publication Date:
OSTI Identifier:
20960151
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 90; Journal Issue: 11; Other Information: DOI: 10.1063/1.2711655; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ATOMIC FORCE MICROSCOPY; CRYSTAL LATTICES; CRYSTALS; DIELECTRIC MATERIALS; FABRICATION; HYDROGEN IONS; ION BEAMS; ION IMPLANTATION; MECHANICAL POLISHING; NUCLEAR REACTION ANALYSIS; ROUGHNESS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; STRONTIUM TITANATES; THIN FILMS

Citation Formats

Roth, Ryan M., Djukic, Djordje, Lee, Yoo Seung, Osgood, Richard M. Jr., Lewis, Penelope A., Bakhru, Sasha, Bakhru, Hassaram, Department of Chemistry, Columbia University, New York, New York 10027, and College of Nanoscale Science and Engineering, State University of New York at Albany, Albany, New York 12203. Fabrication and material properties of submicrometer SrTiO{sub 3} films exfoliated using crystal ion slicing. United States: N. p., 2007. Web. doi:10.1063/1.2711655.
Roth, Ryan M., Djukic, Djordje, Lee, Yoo Seung, Osgood, Richard M. Jr., Lewis, Penelope A., Bakhru, Sasha, Bakhru, Hassaram, Department of Chemistry, Columbia University, New York, New York 10027, & College of Nanoscale Science and Engineering, State University of New York at Albany, Albany, New York 12203. Fabrication and material properties of submicrometer SrTiO{sub 3} films exfoliated using crystal ion slicing. United States. doi:10.1063/1.2711655.
Roth, Ryan M., Djukic, Djordje, Lee, Yoo Seung, Osgood, Richard M. Jr., Lewis, Penelope A., Bakhru, Sasha, Bakhru, Hassaram, Department of Chemistry, Columbia University, New York, New York 10027, and College of Nanoscale Science and Engineering, State University of New York at Albany, Albany, New York 12203. Mon . "Fabrication and material properties of submicrometer SrTiO{sub 3} films exfoliated using crystal ion slicing". United States. doi:10.1063/1.2711655.
@article{osti_20960151,
title = {Fabrication and material properties of submicrometer SrTiO{sub 3} films exfoliated using crystal ion slicing},
author = {Roth, Ryan M. and Djukic, Djordje and Lee, Yoo Seung and Osgood, Richard M. Jr. and Lewis, Penelope A. and Bakhru, Sasha and Bakhru, Hassaram and Department of Chemistry, Columbia University, New York, New York 10027 and College of Nanoscale Science and Engineering, State University of New York at Albany, Albany, New York 12203},
abstractNote = {The crystal quality of submicrometer-thick SrTiO{sub 3} films that are formed by exfoliation from bulk crystals using deep implantation with H-ion beams is investigated. Nuclear reaction analysis and Rutherford backscattering/channeling are used to measure the implantation depth, crystal-lattice disruption, and surface damage prior to exfoliation. The surface profiles of the exfoliated films are examined with atomic force microscopy; the roughness is shown to be reducible to subnanometer levels with postexfoliation mechanical polishing.},
doi = {10.1063/1.2711655},
journal = {Applied Physics Letters},
number = 11,
volume = 90,
place = {United States},
year = {Mon Mar 12 00:00:00 EDT 2007},
month = {Mon Mar 12 00:00:00 EDT 2007}
}