Radio-frequency dielectric-barrier glow discharges in atmospheric argon
- Department of Electronic and Electrical Engineering, Loughborough University, Loughborough, Leicestershire LE11 3TU (United Kingdom)
In this letter, an experimental investigation is presented to characterize the properties and benefits of radio-frequency (rf) dielectric-barrier discharges (DBDs) in atmospheric argon. Compared to rf atmospheric glow discharges generated with bare electrodes, atmospheric argon rf DBDs are shown to remain stable and uniform over a large current range from the {alpha} and the {gamma} modes. Optical emission spectroscopy is used to show an active underpinning plasma chemistry and a gas temperature range of 461-562 K. These highlight the advantages of argon rf DBD as a surface processing technique over more expensive helium-based rf atmospheric glow discharges.
- OSTI ID:
- 20960145
- Journal Information:
- Applied Physics Letters, Vol. 90, Issue 11; Other Information: DOI: 10.1063/1.2713141; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
- Country of Publication:
- United States
- Language:
- English
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