A selfconsistent hybrid model of a dual frequency sheath: Ion energy and angular distributions
Abstract
This paper presents a selfconsistent hybrid model including the fluid model which can describe the characteristics of collisional sheaths driven by dual radiofrequency (DF) sources and Monte Carlo (MC) method which can determine the ion energy and angular distributions incident onto the dual rf powered electrode. The chargeexchange collisions between ions and neutrals are included in the MC model in which a selfconsistent instantaneous electric field obtained from the fluid model is adopted. In the simulation, the driven method we used is either the currentdriven method or the voltagedriven method. In the currentdriven method, the rf current sources are assumed to apply to an electrode, which is the socalled the equivalent circuit model and is used to selfconsistently determine the relationship between the instantaneous sheath potential and the sheath thickness. In the voltagedriven method, however, the rf voltage sources are assumed to apply to an electrode. The dual rf sheath potential, sheath thickness, ion flux, ion energy distributions (IEDs), and ion angular distributions (IADs) are calculated for different parameters. The numerical solutions show that some external parameters such as the bias frequency and power of the lowerfrequency source as well as gas pressure are crucial for determining the structure ofmore »
 Authors:

 State Key Laboratory of Materials Modification by Laser, Electron, and Ion Beams, Department of Physics, Dalian University of Technology, Dalian 116023 (China)
 Publication Date:
 OSTI Identifier:
 20960128
 Resource Type:
 Journal Article
 Journal Name:
 Physics of Plasmas
 Additional Journal Information:
 Journal Volume: 14; Journal Issue: 1; Other Information: DOI: 10.1063/1.2434250; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 1070664X
 Country of Publication:
 United States
 Language:
 English
 Subject:
 70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ANGULAR DISTRIBUTION; CALCIUM NITRIDES; CHARGE EXCHANGE; CURRENTS; ELECTRIC FIELDS; ELECTRIC POTENTIAL; ELECTRODES; ENERGY SPECTRA; EQUIVALENT CIRCUITS; IONS; MONTE CARLO METHOD; NUMERICAL SOLUTION; PLASMA; PLASMA PRESSURE; PLASMA SHEATH; PLASMA SIMULATION; RADIOWAVE RADIATION; THICKNESS
Citation Formats
Zhongling, Dai, Xiang, Xu, and Younian, Wang. A selfconsistent hybrid model of a dual frequency sheath: Ion energy and angular distributions. United States: N. p., 2007.
Web. doi:10.1063/1.2434250.
Zhongling, Dai, Xiang, Xu, & Younian, Wang. A selfconsistent hybrid model of a dual frequency sheath: Ion energy and angular distributions. United States. doi:10.1063/1.2434250.
Zhongling, Dai, Xiang, Xu, and Younian, Wang. Mon .
"A selfconsistent hybrid model of a dual frequency sheath: Ion energy and angular distributions". United States. doi:10.1063/1.2434250.
@article{osti_20960128,
title = {A selfconsistent hybrid model of a dual frequency sheath: Ion energy and angular distributions},
author = {Zhongling, Dai and Xiang, Xu and Younian, Wang},
abstractNote = {This paper presents a selfconsistent hybrid model including the fluid model which can describe the characteristics of collisional sheaths driven by dual radiofrequency (DF) sources and Monte Carlo (MC) method which can determine the ion energy and angular distributions incident onto the dual rf powered electrode. The chargeexchange collisions between ions and neutrals are included in the MC model in which a selfconsistent instantaneous electric field obtained from the fluid model is adopted. In the simulation, the driven method we used is either the currentdriven method or the voltagedriven method. In the currentdriven method, the rf current sources are assumed to apply to an electrode, which is the socalled the equivalent circuit model and is used to selfconsistently determine the relationship between the instantaneous sheath potential and the sheath thickness. In the voltagedriven method, however, the rf voltage sources are assumed to apply to an electrode. The dual rf sheath potential, sheath thickness, ion flux, ion energy distributions (IEDs), and ion angular distributions (IADs) are calculated for different parameters. The numerical solutions show that some external parameters such as the bias frequency and power of the lowerfrequency source as well as gas pressure are crucial for determining the structure of collisional dual rf sheaths and the IEDs. The shapes of the IADs, however, are determined mainly by the gas pressure. Furthermore, it is found that the results from the different driven methods behave in the same way although there are some differences in some quantities.},
doi = {10.1063/1.2434250},
journal = {Physics of Plasmas},
issn = {1070664X},
number = 1,
volume = 14,
place = {United States},
year = {2007},
month = {1}
}