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Title: Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source

Abstract

A regenerative tin liquid microjet target was developed for a high average power extreme ultraviolet (EUV) source. The diameter of the target was smaller than 160 {mu}m and good vacuum lower than 0.5 Pa was maintained during the operation. A maximum EUV conversion efficiency of 1.8% at the Nd:yttrium-aluminum-garnet laser intensity of around 2x10{sup 11} W/cm{sup 2} with a spot diameter of 175 {mu}m (full width at half maximum) was observed. The angular distribution of the EUV emission remained almost isotropic, whereas suprathermal ions mainly emerged toward the target normal.

Authors:
; ;  [1]
  1. Department of Electrical and Electronic Engineering and Photon Science Center, University of Miyazaki, Gakuen Kibanadai Nishi 1-1, Miyazaki 889-2192 (Japan)
Publication Date:
OSTI Identifier:
20953406
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 78; Journal Issue: 3; Other Information: DOI: 10.1063/1.2712787; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
70 PLASMA PHYSICS AND FUSION TECHNOLOGY; ALUMINIUM; ANGULAR DISTRIBUTION; EMISSION; EXTREME ULTRAVIOLET RADIATION; GARNETS; IONS; LASER-PRODUCED PLASMA; LASERS; LIQUIDS; PLASMA PRODUCTION; TIN; YTTRIUM

Citation Formats

Higashiguchi, Takeshi, Hamada, Masaya, and Kubodera, Shoichi. Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source. United States: N. p., 2007. Web. doi:10.1063/1.2712787.
Higashiguchi, Takeshi, Hamada, Masaya, & Kubodera, Shoichi. Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source. United States. doi:10.1063/1.2712787.
Higashiguchi, Takeshi, Hamada, Masaya, and Kubodera, Shoichi. Thu . "Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source". United States. doi:10.1063/1.2712787.
@article{osti_20953406,
title = {Development of a liquid tin microjet target for an efficient laser-produced plasma extreme ultraviolet source},
author = {Higashiguchi, Takeshi and Hamada, Masaya and Kubodera, Shoichi},
abstractNote = {A regenerative tin liquid microjet target was developed for a high average power extreme ultraviolet (EUV) source. The diameter of the target was smaller than 160 {mu}m and good vacuum lower than 0.5 Pa was maintained during the operation. A maximum EUV conversion efficiency of 1.8% at the Nd:yttrium-aluminum-garnet laser intensity of around 2x10{sup 11} W/cm{sup 2} with a spot diameter of 175 {mu}m (full width at half maximum) was observed. The angular distribution of the EUV emission remained almost isotropic, whereas suprathermal ions mainly emerged toward the target normal.},
doi = {10.1063/1.2712787},
journal = {Review of Scientific Instruments},
number = 3,
volume = 78,
place = {United States},
year = {Thu Mar 15 00:00:00 EDT 2007},
month = {Thu Mar 15 00:00:00 EDT 2007}
}