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Title: Invited Review Article: Atom probe tomography

Abstract

The technique of atom probe tomography (APT) is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution (sub-0.3-nm) three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and ceramic materials. This trend toward a broader range of materials and applications is likely to continue.

Authors:
;  [1];  [2]
  1. Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711 (United States)
  2. (United States)
Publication Date:
OSTI Identifier:
20953383
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 78; Journal Issue: 3; Other Information: DOI: 10.1063/1.2709758; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ALLOYS; ATOMS; CERAMICS; DATA ACQUISITION; DIELECTRIC MATERIALS; FILMS; ION MICROSCOPY; METALS; PROBES; REVIEWS; SPATIAL RESOLUTION; THREE-DIMENSIONAL CALCULATIONS

Citation Formats

Kelly, Thomas F., Miller, Michael K., and Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, Mississippi 6136, Oak Ridge, Tennessee 37831-6136. Invited Review Article: Atom probe tomography. United States: N. p., 2007. Web. doi:10.1063/1.2709758.
Kelly, Thomas F., Miller, Michael K., & Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, Mississippi 6136, Oak Ridge, Tennessee 37831-6136. Invited Review Article: Atom probe tomography. United States. doi:10.1063/1.2709758.
Kelly, Thomas F., Miller, Michael K., and Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, Mississippi 6136, Oak Ridge, Tennessee 37831-6136. Thu . "Invited Review Article: Atom probe tomography". United States. doi:10.1063/1.2709758.
@article{osti_20953383,
title = {Invited Review Article: Atom probe tomography},
author = {Kelly, Thomas F. and Miller, Michael K. and Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, Mississippi 6136, Oak Ridge, Tennessee 37831-6136},
abstractNote = {The technique of atom probe tomography (APT) is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution (sub-0.3-nm) three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and ceramic materials. This trend toward a broader range of materials and applications is likely to continue.},
doi = {10.1063/1.2709758},
journal = {Review of Scientific Instruments},
number = 3,
volume = 78,
place = {United States},
year = {Thu Mar 15 00:00:00 EDT 2007},
month = {Thu Mar 15 00:00:00 EDT 2007}
}