Invited Review Article: Atom probe tomography

Kelly, Thomas F; Miller, Michael K

doi:10.1063/1.2709758

Title: Invited Review Article: Atom probe tomography

Full Record
Other Related Research

Abstract

The technique of atom probe tomography (APT) is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution (sub-0.3-nm) three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and ceramic materials. This trend toward a broader range of materials and applications is likely to continue.

Authors:

Kelly, Thomas F; Miller, Michael K ^[1]

Imago Scientific Instruments Corporation, 5500 Nobel Drive, Madison, Wisconsin 53711 (United States)

Publication Date:: Thu Mar 15 00:00:00 EDT 2007

OSTI Identifier:: 20953383

Resource Type:: Journal Article

Journal Name:: Review of Scientific Instruments

Additional Journal Information:: Journal Volume: 78; Journal Issue: 3; Other Information: DOI: 10.1063/1.2709758; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0034-6748

Country of Publication:: United States

Language:: English

Subject:: 46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; ALLOYS; ATOMS; CERAMICS; DATA ACQUISITION; DIELECTRIC MATERIALS; FILMS; ION MICROSCOPY; METALS; PROBES; REVIEWS; SPATIAL RESOLUTION; THREE-DIMENSIONAL CALCULATIONS

Citation Formats


                    Kelly, Thomas F, Miller, Michael K, and Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, Mississippi 6136, Oak Ridge, Tennessee 37831-6136. Invited Review Article: Atom probe tomography.  United States: N. p., 2007. 
        Web.  doi:10.1063/1.2709758.

Copy to clipboard


                    Kelly, Thomas F, Miller, Michael K, & Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, Mississippi 6136, Oak Ridge, Tennessee 37831-6136. Invited Review Article: Atom probe tomography.  United States.  https://doi.org/10.1063/1.2709758

Copy to clipboard


                    Kelly, Thomas F, Miller, Michael K, and Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, Mississippi 6136, Oak Ridge, Tennessee 37831-6136. 2007.  
        "Invited Review Article: Atom probe tomography".  United States.  https://doi.org/10.1063/1.2709758.

Copy to clipboard


                    
@article{osti_20953383,

  title        = {Invited Review Article: Atom probe tomography},

  author       = {Kelly, Thomas F and Miller, Michael K and Oak Ridge National Laboratory, P.O. Box 2008, Building 4500S, Mississippi 6136, Oak Ridge, Tennessee 37831-6136},

  abstractNote = {The technique of atom probe tomography (APT) is reviewed with an emphasis on illustrating what is possible with the technique both now and in the future. APT delivers the highest spatial resolution (sub-0.3-nm) three-dimensional compositional information of any microscopy technique. Recently, APT has changed dramatically with new hardware configurations that greatly simplify the technique and improve the rate of data acquisition. In addition, new methods have been developed to fabricate suitable specimens from new classes of materials. Applications of APT have expanded from structural metals and alloys to thin multilayer films on planar substrates, dielectric films, semiconducting structures and devices, and ceramic materials. This trend toward a broader range of materials and applications is likely to continue.},

  doi          = {10.1063/1.2709758},

  url          = {https://www.osti.gov/biblio/20953383},
  journal      = {Review of Scientific Instruments},

  issn         = {0034-6748},

  number       = 3,

  volume       = 78,

  place        = {United States},

  year         = {Thu Mar 15 00:00:00 EDT 2007},

  month        = {Thu Mar 15 00:00:00 EDT 2007}

}

Copy to clipboard

Journal Article:

https://doi.org/10.1063/1.2709758

Other availability

Find in Google Scholar

Search WorldCat to find libraries that may hold this journal

Save / Share:

Export Metadata

Save to My Library

Similar records in OSTI.GOV collections:

The Role of Electron and Atom Probe Tomography in Characterization of Nuclear Fuels

Journal Article Aitkaliyeva, Assel; Papesch, Cynthia; Wu, Yaqiao; ... - Transactions of the American Nuclear Society

Dramatic advances in materials characterization capabilities over the last few years enabled microstructural and chemical 3D characterization of specimens at the atomic-scale with unprecedented quantitative precision and high data collection rates. These improvements allow for the transition of electron tomography (ET) and atom probe tomography (APT) techniques to a much broader research field and their implementation in the characterization of nuclear fuels and highly radioactive materials. Nanoscale characterization has been widely developed for non-nuclear applications, yet in the nuclear arena, particularly for fuels, these modern characterization techniques have not been applied in concert to elucidate fundamental material behavior in metalmore »« less
Accurate Quantification of Si/SiGe Interface Profiles via Atom Probe Tomography

Journal Article Dyck, Ondrej; Leonard, Donovan; Edge, Lisa; ... - Advanced Materials Interfaces

Pulsed laser atom probe tomography (APT) has enabled the investigation of semiconducting materials at sub-nm length scales and 10 ppm chemical sensitivity. This has enabled APT to be the best technique for nanoscale detection of dopant distributions and low levels of chemical segregation at interfaces, which are both important for semiconductor processing; however, the accuracy of measured interfacial profiles is typically compromised by aberrations. Interfacial profiles in APT data will vary with respect to different interfacial combinations, especially when the evaporation field between two materials is drastically different. Here, the ability of APT to measure SiGe/Si/SiGe interfacial profiles is testedmore »« less
Cited by 20
https://doi.org/10.1002/admi.201700622

Full Text Available
Atom Probe Tomography for Catalysis Applications: A Review

Journal Article Barroo, Cédric; Akey, Austin; Bell, David - Applied Sciences

Atom probe tomography is a well-established analytical instrument for imaging the 3D structure and composition of materials with high mass resolution, sub-nanometer spatial resolution and ppm elemental sensitivity. Thanks to recent hardware developments in Atom Probe Tomography (APT), combined with progress on site-specific focused ion beam (FIB)-based sample preparation methods and improved data treatment software, complex materials can now be routinely investigated. From model samples to complex, usable porous structures, there is currently a growing interest in the analysis of catalytic materials. APT is able to probe the end state of atomic-scale processes, providing information needed to improve the synthesismore »« less
Cited by 10
https://doi.org/10.3390/app9132721

Full Text Available
Three-dimensional nanoscale characterisation of materials by atom probe tomography

Journal Article Devaraj, Arun; Perea, Daniel; Liu, Jia; ... - International Materials Reviews

The development of three-dimensional (3D), characterization techniques with high spatial and mass resolution is crucial for understanding and developing advanced materials for many engineering applications as well as for understanding natural materials. In recent decades, atom probe tomography (APT) which combines a point projection microscope and time-of-flight mass spectrometer has evolved to be an excellent characterization technique capable of providing 3D nanoscale characterization of materials with sub-nanometer scale spatial resolution, with equal sensitivity for all elements. This review discusses the current state as of beginning of the year 2016 of APT instrumentation, new developments in sample preparation methods, experimental proceduresmore »« less
https://doi.org/10.1080/09506608.2016.1270728
Three-dimensional nanoscale characterisation of materials by atom probe tomography

Journal Article Devaraj, Arun; Perea, Daniel; Liu, Jia; ... - International Materials Reviews

The development of three-dimensional (3D), characterization techniques with high spatial and mass resolution is crucial for understanding and developing advanced materials for many engineering applications as well as for understanding natural materials. In recent decades, atom probe tomography (APT) which combines a point projection microscope and time-of-flight mass spectrometer has evolved to be an excellent characterization technique capable of providing 3D nanoscale characterization of materials with sub-nanometer scale spatial resolution, with equal sensitivity for all elements. This review discusses the current state as of beginning of the year 2016 of APT instrumentation, new developments in sample preparation methods, experimental proceduresmore »« less
https://doi.org/10.1080/09506608.2016.1270728

Similar Records