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Title: Laboratory arrangement for soft x-ray zone plate efficiency measurements

Abstract

We demonstrate a laboratory-scale arrangement for rapid and accurate measurements of the absolute and local efficiency of soft x-ray micro zone plates in the water window. This in-house instrument is based on a single-line {lambda}=2.88 nm liquid-jet laser-plasma source. Measurements are performed by a simultaneous comparison of first diffraction-order photon flux with the flux in a calibrated reference signal. This arrangement eliminates existing source emission fluctuations. The performance of the method is demonstrated by the result from measurements of two {approx}55 {mu}m diameter nickel micro zone plates, showing a groove efficiency of 12.9%{+-}1.1% and 11.7%{+-}1.0%. Furthermore, we show that spatially resolved efficiency mapping is an effective tool for a detailed characterization of local zone plate properties. Thus, this laboratory-scale instrument allows rapid feedback to the fabrication process which is important for future improvements.

Authors:
; ; ; ;  [1]
  1. Biomedical and X-Ray Physics, Department of Applied Physics, Royal Institute of Technology, AlbaNova, SE-106 91 Stockholm (Sweden)
Publication Date:
OSTI Identifier:
20953272
Resource Type:
Journal Article
Resource Relation:
Journal Name: Review of Scientific Instruments; Journal Volume: 78; Journal Issue: 2; Other Information: DOI: 10.1063/1.2472590; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
46 INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY; DIFFRACTION; EFFICIENCY; FABRICATION; FEEDBACK; FLUCTUATIONS; NICKEL; OPTICS; PHOTONS; PLASMA; PLATES; SIGNALS; SOFT X RADIATION; ZONES

Citation Formats

Bertilson, Michael C., Takman, Per A. C., Holmberg, Anders, Vogt, Ulrich, and Hertz, Hans M. Laboratory arrangement for soft x-ray zone plate efficiency measurements. United States: N. p., 2007. Web. doi:10.1063/1.2472590.
Bertilson, Michael C., Takman, Per A. C., Holmberg, Anders, Vogt, Ulrich, & Hertz, Hans M. Laboratory arrangement for soft x-ray zone plate efficiency measurements. United States. doi:10.1063/1.2472590.
Bertilson, Michael C., Takman, Per A. C., Holmberg, Anders, Vogt, Ulrich, and Hertz, Hans M. Thu . "Laboratory arrangement for soft x-ray zone plate efficiency measurements". United States. doi:10.1063/1.2472590.
@article{osti_20953272,
title = {Laboratory arrangement for soft x-ray zone plate efficiency measurements},
author = {Bertilson, Michael C. and Takman, Per A. C. and Holmberg, Anders and Vogt, Ulrich and Hertz, Hans M.},
abstractNote = {We demonstrate a laboratory-scale arrangement for rapid and accurate measurements of the absolute and local efficiency of soft x-ray micro zone plates in the water window. This in-house instrument is based on a single-line {lambda}=2.88 nm liquid-jet laser-plasma source. Measurements are performed by a simultaneous comparison of first diffraction-order photon flux with the flux in a calibrated reference signal. This arrangement eliminates existing source emission fluctuations. The performance of the method is demonstrated by the result from measurements of two {approx}55 {mu}m diameter nickel micro zone plates, showing a groove efficiency of 12.9%{+-}1.1% and 11.7%{+-}1.0%. Furthermore, we show that spatially resolved efficiency mapping is an effective tool for a detailed characterization of local zone plate properties. Thus, this laboratory-scale instrument allows rapid feedback to the fabrication process which is important for future improvements.},
doi = {10.1063/1.2472590},
journal = {Review of Scientific Instruments},
number = 2,
volume = 78,
place = {United States},
year = {Thu Feb 15 00:00:00 EST 2007},
month = {Thu Feb 15 00:00:00 EST 2007}
}