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Title: Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory

Abstract

The high-spatial frequency roughness of a mirror operating at extreme ultraviolet (EUV)wavelengths is crucial for the reflective performance and is subject to very stringent specifications. To understand and predict mirror performance, precision metrology is required for measuring the surface roughness. Zerodur mirror substrates made by two different polishing vendors for a suite of EUV telescopes for solar physics were characterized by atomic force microscopy (AFM). The AFM measurements revealed features in the topography of each substrate that are associated with specific polishing techniques. Theoretical predictions of the mirror performance based on the AFM-measured high-spatial-frequency roughness are in good agreement with EUV reflectance measurements of the mirrors after multilayer coating.

Authors:
; ; ; ; ; ;
Publication Date:
OSTI Identifier:
20929738
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Optics; Journal Volume: 46; Journal Issue: 16; Other Information: DOI: 10.1364/AO.46.003156; (c) 2007 Optical Society of America; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; 36 MATERIALS SCIENCE; ACCURACY; ATOMIC FORCE MICROSCOPY; EXTREME ULTRAVIOLET RADIATION; MIRRORS; NASA; OPTICAL PROPERTIES; OPTICS; PERFORMANCE; POLISHING; ROUGHNESS; SPECIFICATIONS; SUBSTRATES; SURFACE COATING; TELESCOPES; TEXTURE; THIN FILMS; TOPOGRAPHY; WAVELENGTHS

Citation Formats

Soufli, Regina, Baker, Sherry L., Windt, David L., Gullikson, Eric M., Robinson, Jeff C., Podgorski, William A., and Golub, Leon. Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory. United States: N. p., 2007. Web. doi:10.1364/AO.46.003156.
Soufli, Regina, Baker, Sherry L., Windt, David L., Gullikson, Eric M., Robinson, Jeff C., Podgorski, William A., & Golub, Leon. Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory. United States. doi:10.1364/AO.46.003156.
Soufli, Regina, Baker, Sherry L., Windt, David L., Gullikson, Eric M., Robinson, Jeff C., Podgorski, William A., and Golub, Leon. Fri . "Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory". United States. doi:10.1364/AO.46.003156.
@article{osti_20929738,
title = {Atomic force microscopy characterization of Zerodur mirror substrates for the extreme ultraviolet telescopes aboard NASA's Solar Dynamics Observatory},
author = {Soufli, Regina and Baker, Sherry L. and Windt, David L. and Gullikson, Eric M. and Robinson, Jeff C. and Podgorski, William A. and Golub, Leon},
abstractNote = {The high-spatial frequency roughness of a mirror operating at extreme ultraviolet (EUV)wavelengths is crucial for the reflective performance and is subject to very stringent specifications. To understand and predict mirror performance, precision metrology is required for measuring the surface roughness. Zerodur mirror substrates made by two different polishing vendors for a suite of EUV telescopes for solar physics were characterized by atomic force microscopy (AFM). The AFM measurements revealed features in the topography of each substrate that are associated with specific polishing techniques. Theoretical predictions of the mirror performance based on the AFM-measured high-spatial-frequency roughness are in good agreement with EUV reflectance measurements of the mirrors after multilayer coating.},
doi = {10.1364/AO.46.003156},
journal = {Applied Optics},
number = 16,
volume = 46,
place = {United States},
year = {Fri Jun 01 00:00:00 EDT 2007},
month = {Fri Jun 01 00:00:00 EDT 2007}
}