Recent advances in FIB-TEM specimen preparation techniques

Journal Article · Sat Jul 15 00:00:00 EDT 2006 · Materials Characterization

OSTI ID:20889839

Jian, Li ^[1]; Malis, T ^[1]; Dionne, S ^[1]

---

1. Materials Technology Laboratory, Natural Resources Canada, Ottawa, Ontario, K1A 0G1 (Canada)

Preparing high-quality transmission electron microscopy (TEM) specimens is of paramount importance in TEM studies. The development of the focused ion beam (FIB) microscope has greatly enhanced TEM specimen preparation capabilities. In recent years, various FIB-TEM foil preparation techniques have been developed. However, the currently available techniques fail to produce TEM specimens from fragile and ultra-fine specimens such as fine fibers. In this paper, the conventional FIB-TEM specimen preparation techniques are reviewed, and their advantages and shortcomings are compared. In addition, a new technique suitable to prepare TEM samples from ultra-fine specimens is demonstrated.

• OSTI ID: 20889839
• Journal Information: Materials Characterization, Vol. 57, Issue 1; Other Information: DOI: 10.1016/j.matchar.2005.12.007; PII: S1044-5803(05)00278-0; Copyright (c) 2006 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved; Country of input: International Atomic Energy Agency (IAEA); ISSN 1044-5803
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
FIBERS
FOILS
ION BEAMS
MICROSCOPES
TRANSMISSION ELECTRON MICROSCOPY