Preparation of Pb{sub 0.98}La{sub 0.02}(Zr{sub 0.65}Ti{sub 0.35})O{sub 3} films and their fine patterning
The photosensitive lanthanum-doped lead zirconate titanate (PLZT) gel films were prepared by chemical modification with acetylacetone (AcAcH), and their fourier transform infrared (FT-IR) spectra and ultraviolet visible (UV-Vis) spectra were measured. The results show that the chelate rings of AcAcH with Ti or Zr are formed in the PLZT gel films. With irradiation of UV light, the chelate rings are photolyzed, and lead to a change of the solubility of the PLZT gel films in methanol. Transmission electron microscope (TEM) observations show that the perovskite phase is crystallized in PLZT thin film after heat treatment at 700 deg. C, whose grain sizes are less than or equal to 60 nm. The PLZT thin films exhibited hysteresis loops and good fatigue properties.
- OSTI ID:
- 20888029
- Journal Information:
- Materials Research Bulletin, Vol. 39, Issue 3; Other Information: DOI: 10.1016/j.materresbull.2003.10.009; PII: S0025540803003337; Copyright (c) 2003 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved; Country of input: International Atomic Energy Agency (IAEA); ISSN 0025-5408
- Country of Publication:
- United States
- Language:
- English
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Related Subjects
ACETYLACETONE
CHELATES
DOPED MATERIALS
FATIGUE
FOURIER TRANSFORMATION
GRAIN SIZE
INFRARED SPECTRA
IRRADIATION
LANTHANUM
LANTHANUM OXIDES
LEAD OXIDES
PEROVSKITE
PLZT
PZT
THIN FILMS
TITANIUM OXIDES
TRANSMISSION ELECTRON MICROSCOPY
ULTRAVIOLET RADIATION
ULTRAVIOLET SPECTRA
ZIRCONIUM OXIDES