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Title: Influence of initial surface reconstruction on nitridation of Al{sub 2}O{sub 3} (0001) using low pressure ammonia

Abstract

The purpose of this study is to investigate the effect of initial surface reconstruction on the nitridation process of Al{sub 2}O{sub 3} (0001). This was done by exposing differently reconstructed sapphire substrates at different temperatures to low pressure ammonia (NH{sub 3}). Structural and chemical analysis were carried out using low-electron energy diffraction and x-ray photoelectron spectroscopy. The experiments revealed that using low pressure ammonia (P{sub NH{sub 3}}<1x10{sup -5} Torr), no nitridation takes place on (1x1) unreconstructed surfaces. However, when the unreconstructed surface starts to change to a ({radical}(31)x{radical}(31))R{+-}9 deg. reconstructed surface, with increasing substrate temperature, the nitridation becomes successful. When using the initially reconstructed surface, the nitridation is successful even from the lowest temperature used. These results suggest that the initial surface reconstruction has a major effect on the nitridation process. This kinetic behavior has not been reported before, with most nitridation studies mainly focusing on the effect of surface temperature on the resulting surface morphology, rather than the actual kinetics of the process itself.

Authors:
; ; ; ;  [1]
  1. Material och Halvledarfysik, ICT KTH-Electrum 229, S-16440 Kista (Sweden)
Publication Date:
OSTI Identifier:
20884966
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 101; Journal Issue: 1; Other Information: DOI: 10.1063/1.2384807; (c) 2007 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; ALUMINIUM OXIDES; AMMONIA; CHEMICAL ANALYSIS; ELECTRON DIFFRACTION; ELECTRONS; MORPHOLOGY; NITRIDATION; SAPPHIRE; SUBSTRATES; X-RAY PHOTOELECTRON SPECTROSCOPY

Citation Formats

Agnarsson, B, Goethelid, M, Olafsson, S, Gislason, H P, Karlsson, U O, Science Institute, University of Iceland, Dunhaga 3, 107 Reykjavik, and Material och Halvledarfysik, ICT KTH-Electrum 229, S-16440 Kista. Influence of initial surface reconstruction on nitridation of Al{sub 2}O{sub 3} (0001) using low pressure ammonia. United States: N. p., 2007. Web. doi:10.1063/1.2384807.
Agnarsson, B, Goethelid, M, Olafsson, S, Gislason, H P, Karlsson, U O, Science Institute, University of Iceland, Dunhaga 3, 107 Reykjavik, & Material och Halvledarfysik, ICT KTH-Electrum 229, S-16440 Kista. Influence of initial surface reconstruction on nitridation of Al{sub 2}O{sub 3} (0001) using low pressure ammonia. United States. https://doi.org/10.1063/1.2384807
Agnarsson, B, Goethelid, M, Olafsson, S, Gislason, H P, Karlsson, U O, Science Institute, University of Iceland, Dunhaga 3, 107 Reykjavik, and Material och Halvledarfysik, ICT KTH-Electrum 229, S-16440 Kista. 2007. "Influence of initial surface reconstruction on nitridation of Al{sub 2}O{sub 3} (0001) using low pressure ammonia". United States. https://doi.org/10.1063/1.2384807.
@article{osti_20884966,
title = {Influence of initial surface reconstruction on nitridation of Al{sub 2}O{sub 3} (0001) using low pressure ammonia},
author = {Agnarsson, B and Goethelid, M and Olafsson, S and Gislason, H P and Karlsson, U O and Science Institute, University of Iceland, Dunhaga 3, 107 Reykjavik and Material och Halvledarfysik, ICT KTH-Electrum 229, S-16440 Kista},
abstractNote = {The purpose of this study is to investigate the effect of initial surface reconstruction on the nitridation process of Al{sub 2}O{sub 3} (0001). This was done by exposing differently reconstructed sapphire substrates at different temperatures to low pressure ammonia (NH{sub 3}). Structural and chemical analysis were carried out using low-electron energy diffraction and x-ray photoelectron spectroscopy. The experiments revealed that using low pressure ammonia (P{sub NH{sub 3}}<1x10{sup -5} Torr), no nitridation takes place on (1x1) unreconstructed surfaces. However, when the unreconstructed surface starts to change to a ({radical}(31)x{radical}(31))R{+-}9 deg. reconstructed surface, with increasing substrate temperature, the nitridation becomes successful. When using the initially reconstructed surface, the nitridation is successful even from the lowest temperature used. These results suggest that the initial surface reconstruction has a major effect on the nitridation process. This kinetic behavior has not been reported before, with most nitridation studies mainly focusing on the effect of surface temperature on the resulting surface morphology, rather than the actual kinetics of the process itself.},
doi = {10.1063/1.2384807},
url = {https://www.osti.gov/biblio/20884966}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 1,
volume = 101,
place = {United States},
year = {Mon Jan 01 00:00:00 EST 2007},
month = {Mon Jan 01 00:00:00 EST 2007}
}