Micromachining of ridge optical waveguides on top of He{sup +}-implanted {beta}-BaB{sub 2}O{sub 4} crystals by femtosecond laser ablation

Degl'Innocenti, R; Reidt, S; Guarino, A; Rezzonico, D; Poberaj, G; Guenter, P

doi:10.1063/1.2396716

Title: Micromachining of ridge optical waveguides on top of He{sup +}-implanted {beta}-BaB{sub 2}O{sub 4} crystals by femtosecond laser ablation

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Abstract

We report on a technique for the fabrication of ridge optical waveguides on top of {beta}-BaB{sub 2}O{sub 4} (BBO) crystals. The BBO crystals were first implanted by He{sup +} ions to form planar optical waveguides. In the second step, the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar{sup +} ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dB/cm at 532 nm, making them suitable for nonlinear- and electro-optical applications.

Authors:

Degl'Innocenti, R; Reidt, S; Guarino, A; Rezzonico, D; Poberaj, G; Guenter, P ^[1]

Nonlinear Optics Laboratory, Institute of Quantum Electronics, ETH Zurich, CH-8093 Zurich (Switzerland)

Publication Date:: Fri Dec 01 00:00:00 EST 2006

OSTI Identifier:: 20884897

Resource Type:: Journal Article

Journal Name:: Journal of Applied Physics

Additional Journal Information:: Journal Volume: 100; Journal Issue: 11; Other Information: DOI: 10.1063/1.2396716; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979

Country of Publication:: United States

Language:: English

Subject:: 36 MATERIALS SCIENCE; ABLATION; ARGON IONS; BARIUM COMPOUNDS; BORATES; CRYSTALS; FABRICATION; HELIUM IONS; ION IMPLANTATION; LASERS; NONLINEAR OPTICS; PLASMA; ROUGHNESS; WAVEGUIDES

Citation Formats


                    Degl'Innocenti, R, Reidt, S, Guarino, A, Rezzonico, D, Poberaj, G, and Guenter, P. Micromachining of ridge optical waveguides on top of He{sup +}-implanted {beta}-BaB{sub 2}O{sub 4} crystals by femtosecond laser ablation.  United States: N. p., 2006. 
        Web.  doi:10.1063/1.2396716.

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                    Degl'Innocenti, R, Reidt, S, Guarino, A, Rezzonico, D, Poberaj, G, & Guenter, P. Micromachining of ridge optical waveguides on top of He{sup +}-implanted {beta}-BaB{sub 2}O{sub 4} crystals by femtosecond laser ablation.  United States.  https://doi.org/10.1063/1.2396716

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                    Degl'Innocenti, R, Reidt, S, Guarino, A, Rezzonico, D, Poberaj, G, and Guenter, P. 2006.  
        "Micromachining of ridge optical waveguides on top of He{sup +}-implanted {beta}-BaB{sub 2}O{sub 4} crystals by femtosecond laser ablation".  United States.  https://doi.org/10.1063/1.2396716.

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@article{osti_20884897,

  title        = {Micromachining of ridge optical waveguides on top of He{sup +}-implanted {beta}-BaB{sub 2}O{sub 4} crystals by femtosecond laser ablation},

  author       = {Degl'Innocenti, R and Reidt, S and Guarino, A and Rezzonico, D and Poberaj, G and Guenter, P},

  abstractNote = {We report on a technique for the fabrication of ridge optical waveguides on top of {beta}-BaB{sub 2}O{sub 4} (BBO) crystals. The BBO crystals were first implanted by He{sup +} ions to form planar optical waveguides. In the second step, the femtosecond laser ablation technique was employed for micromachining of ridge-type optical waveguides. A thorough study of material-specific ablation parameters for BBO has been performed in order to achieve ablated structures with smooth sidewalls. A further process of Ar{sup +} ion smoothing in a plasma chamber was used to reduce the sidewall roughness of the ablated ridges from 75 to 35 nm root mean square. We demonstrated optical waveguiding in these femtosecond-ablated plasma-treated waveguides and measured total propagation losses of less than 10 dB/cm at 532 nm, making them suitable for nonlinear- and electro-optical applications.},

  doi          = {10.1063/1.2396716},

  url          = {https://www.osti.gov/biblio/20884897},
  journal      = {Journal of Applied Physics},

  issn         = {0021-8979},

  number       = 11,

  volume       = 100,

  place        = {United States},

  year         = {Fri Dec 01 00:00:00 EST 2006},

  month        = {Fri Dec 01 00:00:00 EST 2006}

}

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