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Title: Formation of silicon nanocrystals in sapphire by ion implantation and the origin of visible photoluminescence

Journal Article · · Journal of Applied Physics
DOI:https://doi.org/10.1063/1.2355543· OSTI ID:20884760
; ; ; ; ; ;  [1]
  1. Department of Physics, Middle East Technical University, 06531 Ankara (Turkey)

Silicon nanocrystals, average sizes ranging between 3 and 7 nm, were formed in sapphire matrix by ion implantation and subsequent annealing. Evolution of the nanocrystals was detected by Raman spectroscopy and x-ray diffraction (XRD). Raman spectra display that clusters in the matrix start to form nanocrystalline structures at annealing temperatures as low as 800 deg. C in samples with high dose Si implantation. The onset temperature of crystallization increases with decreasing dose. Raman spectroscopy and XRD reveal gradual transformation of Si clusters into crystalline form. Visible photoluminescence band appears following implantation and its intensity increases with subsequent annealing process. While the center of the peak does not shift, the intensity of the peak decreases with increasing dose. The origin of the observed photoluminescence is discussed in terms of radiation induced defects in the sapphire matrix.

OSTI ID:
20884760
Journal Information:
Journal of Applied Physics, Vol. 100, Issue 7; Other Information: DOI: 10.1063/1.2355543; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0021-8979
Country of Publication:
United States
Language:
English