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Title: Enhanced electrical characteristics of Au nanoparticles embedded in high-k HfO{sub 2} matrix

Abstract

We present experimental results for laser-induced Au nanoparticle (NP) embedded in a HfO{sub 2} high-k dielectric matrix. Cross-sectional transmission electron microscopy images showed that the Au NPs of 8 nm in diameter were clearly embedded in HfO{sub 2} matrix. Capacitance-voltage measurements of Pt/HfO{sub 2}/Au NPs/HfO{sub 2} on p-type Si substrate reliably exhibited metal-oxide-semiconductor behavior with a large flatband shift of 4.7 V. In addition, the charge retention time at room temperature was found to exceed 10{sup 5} h. This longer time was attributed to the higher electron barrier height via high work function of the Au NP.

Authors:
; ; ; ; ;  [1]
  1. New Functional Materials and Devices Laboratory, Department of Physics, Hanyang University, Seoul 133-791 (Korea, Republic of)
Publication Date:
OSTI Identifier:
20884747
Resource Type:
Journal Article
Journal Name:
Journal of Applied Physics
Additional Journal Information:
Journal Volume: 100; Journal Issue: 6; Other Information: DOI: 10.1063/1.2347703; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); Journal ID: ISSN 0021-8979
Country of Publication:
United States
Language:
English
Subject:
36 MATERIALS SCIENCE; CAPACITANCE; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; ELECTRONS; GOLD; HAFNIUM OXIDES; LASERS; NANOSTRUCTURES; PARTICLES; PLATINUM; SEMICONDUCTOR MATERIALS; SUBSTRATES; TEMPERATURE DEPENDENCE; TEMPERATURE RANGE 0273-0400 K; THIN FILMS; TIME DEPENDENCE; TRANSMISSION ELECTRON MICROSCOPY; WORK FUNCTIONS

Citation Formats

Yang, Jung Yup, Kim, Ju Hyung, Choi, Won Joon, Do, Young Ho, Kim, Chae Ok, and Hong, Jin Pyo. Enhanced electrical characteristics of Au nanoparticles embedded in high-k HfO{sub 2} matrix. United States: N. p., 2006. Web. doi:10.1063/1.2347703.
Yang, Jung Yup, Kim, Ju Hyung, Choi, Won Joon, Do, Young Ho, Kim, Chae Ok, & Hong, Jin Pyo. Enhanced electrical characteristics of Au nanoparticles embedded in high-k HfO{sub 2} matrix. United States. https://doi.org/10.1063/1.2347703
Yang, Jung Yup, Kim, Ju Hyung, Choi, Won Joon, Do, Young Ho, Kim, Chae Ok, and Hong, Jin Pyo. 2006. "Enhanced electrical characteristics of Au nanoparticles embedded in high-k HfO{sub 2} matrix". United States. https://doi.org/10.1063/1.2347703.
@article{osti_20884747,
title = {Enhanced electrical characteristics of Au nanoparticles embedded in high-k HfO{sub 2} matrix},
author = {Yang, Jung Yup and Kim, Ju Hyung and Choi, Won Joon and Do, Young Ho and Kim, Chae Ok and Hong, Jin Pyo},
abstractNote = {We present experimental results for laser-induced Au nanoparticle (NP) embedded in a HfO{sub 2} high-k dielectric matrix. Cross-sectional transmission electron microscopy images showed that the Au NPs of 8 nm in diameter were clearly embedded in HfO{sub 2} matrix. Capacitance-voltage measurements of Pt/HfO{sub 2}/Au NPs/HfO{sub 2} on p-type Si substrate reliably exhibited metal-oxide-semiconductor behavior with a large flatband shift of 4.7 V. In addition, the charge retention time at room temperature was found to exceed 10{sup 5} h. This longer time was attributed to the higher electron barrier height via high work function of the Au NP.},
doi = {10.1063/1.2347703},
url = {https://www.osti.gov/biblio/20884747}, journal = {Journal of Applied Physics},
issn = {0021-8979},
number = 6,
volume = 100,
place = {United States},
year = {Fri Sep 15 00:00:00 EDT 2006},
month = {Fri Sep 15 00:00:00 EDT 2006}
}