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Title: Electron transport through individual Ge self-assembled quantum dots on Si

Journal Article · · Applied Physics Letters
DOI:https://doi.org/10.1063/1.2338004· OSTI ID:20883180
; ;  [1]
  1. Department of Materials Science and Engineering, National Cheng Kung University, Tainan, Taiwan 701 (China)

Electrical properties of self-assembled quantum dots have been the subject of intensive research due to quantum confinement. Here the authors report on the fabrication of Ge quantum dots (QDs) onto Si (100) by ultrahigh-vacuum ion beam sputtering and the electrical properties of individual QDs. Transmission electron microscopy images show that samples with completely incoherent or coherent semispherical islands can be produced under different ion energies. The current-voltage (I-V) characteristics with conductive atomic force microscopy at room temperature. exhibit linear behavior at low bias and nonlinear behavior at large bias from coherent islands, whereas the staircase structures are clearly observed in the I-V curve from incoherent islands, which are attributed to electron tunneling through the quantized energy levels of a single Ge QD.

OSTI ID:
20883180
Journal Information:
Applied Physics Letters, Vol. 89, Issue 8; Other Information: DOI: 10.1063/1.2338004; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
Country of Publication:
United States
Language:
English