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Title: Atmospheric pressure microplasma jet as a depositing tool

Abstract

An atmospheric pressure microplasma jet is developed for depositing homogeneous thin films from C{sub 2}H{sub 2}. The adjustment of the gas flow through the microplasma jet assures optimal flow conditions as well as minimizes deposition inside the jet. In addition, the formation of an argon boundary layer surrounding the emerging plasma beam separates the ambient atmosphere from the flow of growth precursor. Thereby the incorporation of nitrogen and oxygen from the ambient atmosphere into the deposited film is suppressed. Soft polymerlike hydrogenated amorphous carbon (a-C:H) films are deposited at the rate of a few nm/s on the area of a few square millimeters.

Authors:
; ; ;  [1]
  1. Arbeitsgruppe Reaktive Plasmen, Fakultaet fuer Physik und Astronomie, Ruhr-Universitaet Bochum, Universitaetsstr. 150, 44780 Bochum (Germany)
Publication Date:
OSTI Identifier:
20880182
Resource Type:
Journal Article
Resource Relation:
Journal Name: Applied Physics Letters; Journal Volume: 89; Journal Issue: 25; Other Information: DOI: 10.1063/1.2423233; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA)
Country of Publication:
United States
Language:
English
Subject:
71 CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS; AMORPHOUS STATE; ARGON; ATMOSPHERES; ATMOSPHERIC PRESSURE; BOUNDARY LAYERS; CARBON; CHEMICAL VAPOR DEPOSITION; GAS FLOW; HYDROGEN; HYDROGENATION; NITROGEN; OXYGEN; PLASMA; PLASMA JETS; PRECURSOR; THIN FILMS

Citation Formats

Benedikt, J., Focke, K., Yanguas-Gil, A., and Keudell, A. von. Atmospheric pressure microplasma jet as a depositing tool. United States: N. p., 2006. Web. doi:10.1063/1.2423233.
Benedikt, J., Focke, K., Yanguas-Gil, A., & Keudell, A. von. Atmospheric pressure microplasma jet as a depositing tool. United States. doi:10.1063/1.2423233.
Benedikt, J., Focke, K., Yanguas-Gil, A., and Keudell, A. von. Mon . "Atmospheric pressure microplasma jet as a depositing tool". United States. doi:10.1063/1.2423233.
@article{osti_20880182,
title = {Atmospheric pressure microplasma jet as a depositing tool},
author = {Benedikt, J. and Focke, K. and Yanguas-Gil, A. and Keudell, A. von},
abstractNote = {An atmospheric pressure microplasma jet is developed for depositing homogeneous thin films from C{sub 2}H{sub 2}. The adjustment of the gas flow through the microplasma jet assures optimal flow conditions as well as minimizes deposition inside the jet. In addition, the formation of an argon boundary layer surrounding the emerging plasma beam separates the ambient atmosphere from the flow of growth precursor. Thereby the incorporation of nitrogen and oxygen from the ambient atmosphere into the deposited film is suppressed. Soft polymerlike hydrogenated amorphous carbon (a-C:H) films are deposited at the rate of a few nm/s on the area of a few square millimeters.},
doi = {10.1063/1.2423233},
journal = {Applied Physics Letters},
number = 25,
volume = 89,
place = {United States},
year = {Mon Dec 18 00:00:00 EST 2006},
month = {Mon Dec 18 00:00:00 EST 2006}
}