Electron heating mode transitions in dual frequency capacitive discharges

Journal Article · Mon Dec 04 00:00:00 EST 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2402226· OSTI ID:20880121

Turner, M M; Chabert, P ^[1]

---

1. School of Physical Sciences, Dublin City University, Dublin 9, Ireland and National Centre for Plasma Science and Technology, Dublin City University, Dublin 9 (Ireland)

The authors consider electron heating in the sheath regions of capacitive discharges excited by a combination of two frequencies, one much higher than the other. There is a common supposition that in such discharges the higher frequency is the dominant source of electron heating. In this letter, the authors discuss closed analytic expressions quantifying the Ohmic and collisionless electron heating in a dual frequency discharge. In both cases, the authors show that the lower frequency parameters strongly influence the heating effect. Moreover, this influence is parametrically different, so that the dominant heating mechanism may be changed by varying the low frequency current density.

• OSTI ID: 20880121
• Journal Information: Applied Physics Letters, Vol. 89, Issue 23; Other Information: DOI: 10.1063/1.2402226; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
CURRENT DENSITY
ELECTRONS
HEATING
HIGH-FREQUENCY DISCHARGES
PLASMA
PLASMA SHEATH