Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique

Journal Article · Mon Oct 30 00:00:00 EST 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2362591· OSTI ID:20880063

Tanaka, Hiroki; Hashimoto, Yuki; Tamaru, Kouji; Takahashi, Akihiko; Okada, Tatsuo ^[1]

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1. Department of Electrical and Electronic Systems Engineering, Graduate School of Information Science and Electrical Engineering, Kyushu University, 6-10-1 Hakozaki, Fukuoka 812-8581 (Japan)

The behavior of debris generated from a laser-produced plasma (LPP) for the extreme ultraviolet light source at 13.5 nm has been studied using a laser induced fluorescence (LIF) imaging system. Tin (Sn) LPPs were produced by irradiating a flat Sn plate and Sn thin films perpendicularly with a Nd:YAG laser beam. When a thin Sn film was used as a target material, the depletion of the Sn atoms was clearly observed along the Nd:YAG laser beam. The LIF system was also used for visualizing the sputtering process of a mirror substrate by the fast ions generated from the plasma.

• OSTI ID: 20880063
• Journal Information: Applied Physics Letters, Vol. 89, Issue 18; Other Information: DOI: 10.1063/1.2362591; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

36 MATERIALS SCIENCE
ALUMINIUM OXIDES
ATOMS
DEPOSITION
EXTREME ULTRAVIOLET RADIATION
FERRITE GARNETS
FLUORESCENCE
LASER-PRODUCED PLASMA
LIGHT SOURCES
NEODYMIUM LASERS
PLASMA PRODUCTION
SPUTTERING
SUBSTRATES
THIN FILMS
TIN
YTTRIUM COMPOUNDS