Discharge characteristics of atmospheric-pressure radio-frequency glow discharges with argon/nitrogen

Journal Article · Mon Oct 16 00:00:00 EDT 2006 · Applied Physics Letters

DOI:https://doi.org/10.1063/1.2362631· OSTI ID:20880034

Huabo, Wang; Wenting, Sun; Heping, Li; Chengyu, Bao; Xing, Gao; Huiying, Luo ^[1]

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1. Department of Engineering Physics, Tsinghua University, Beijing 100084 (China)

In this letter, atmospheric-pressure glow discharges in {gamma} mode with argon/nitrogen as the plasma-forming gas using water-cooled, bare copper electrodes driven by radio-frequency power supply at 13.56 MHz are achieved. The preliminary studies on the discharge characteristics show that, induced by the {alpha}-{gamma} coexisting mode or {gamma} mode discharge of argon, argon-nitrogen mixture with any mixing ratios, even pure nitrogen, can be employed to generate the stable {gamma} mode radio-frequency, atmospheric-pressure glow discharges and the discharge voltage rises with increasing the fraction of nitrogen in the argon-nitrogen mixture for a constant total gas flow rate.

• OSTI ID: 20880034
• Journal Information: Applied Physics Letters, Vol. 89, Issue 16; Other Information: DOI: 10.1063/1.2362631; (c) 2006 American Institute of Physics; Country of input: International Atomic Energy Agency (IAEA); ISSN 0003-6951
• Country of Publication: United States
• Language: English

Related Subjects

71 CLASSICAL AND QUANTUM MECHANICS
GENERAL PHYSICS
ARGON
ATMOSPHERIC PRESSURE
COPPER
ELECTRIC POTENTIAL
ELECTRODES
GAS FLOW
GLOW DISCHARGES
HIGH-FREQUENCY DISCHARGES
MHZ RANGE 01-100
MIXING RATIO
MIXTURES
NITROGEN
PLASMA
RADIOWAVE RADIATION